基于NI-VISA的晶圆测试探针台远程控制软件的设计与实现  

Design and Implementation of Remote Control Software for Wafer-Test Prober Equipment Based on NI-VISA

作　　者：杜开元 袁俊 卢旭坤 Du Kaiyuan;Yuan Jun;Lu Xukun(Guangdong Leadyo IC Testing Co.,Ltd.,Dongguan 523041,China;School of Microelectronics,Xidian University,Xi'an 710071,China)

机构地区：[1]广东利扬芯片测试股份有限公司,广东东莞523041 [2]西安电子科技大学微电子学院,西安710071

出　　处：《计算机测量与控制》2021年第1期135-139,199,共6页Computer Measurement &Control

摘　　要：在晶圆级芯片测试过程中,晶圆探针台是测试正确进行的关键实施设备,探针台的使用与输出的map图等数据将直接反应晶圆(wafer)测试情况;目前探针台(prober)设备存在型号多、指令类型繁杂和必须现场操作的问题,增加了测试人员对测试方案开发以及量产测试监测的难度;为此提出了一种基于NI-VISA与网络地址转换(network address translation,NAT)内外网穿透的软件设计,通过将NI底层动态链接库嵌入到软件函数中,并集成为人机交互界面,实现测站终端与探针台快速连接控制,并通过快速反向代理(fast reverse proxy,FRP)技术实现内外网NAT穿透,实现远程控制监控探针台;该软件设计在解决芯片测试方案远程调试困难的同时大幅缩短了测试方案开发周期;在提高了工作效率的基础上,减少了不必要的人力成本,有助于晶圆级芯片测试方案开发以及探针台设备监控的工作。The wafer prober is the key implementation equipment for correct testing in the wafer testing process.The use of the prober and the output die map and other data will directly reflect the wafer testing conditions;At present,the fact about wafer prober is that there are many types of prober,multifarious commands and necessary to operate in the field,which makes it more difficult for test engineer to develop the test plan and monitor the mass production test;For this reason,a software design based on NI-VISA and NAT-DDNS is proposed in this paper.By embedding the NI bottom dynamic link library into the software function and integrating it into the human-computer interaction interface,the terminal of the measuring station and the prober station can be quickly connected and controlled.Moreover,the internal and external network NAT can be penetrated through the FRP technology to realize the remote control of the monitoring prober station.The software design not only solves the difficulty of remote debugging of the chip test scheme,but also greatly shortens the development cycle of the test scheme.On the basis of improving work efficiency,unnecessary labor cost is reduced,which is helpful for wafer testing scenarios developing and probe equipment monitoring.

关 键 词：晶圆测试 Prober探针台 远程控制 内外网NAT穿透 

分 类 号：TP3[自动化与计算机技术—计算机科学与技术]