化学溶液法涂层导体金属基带表面优化研究进展  

Research Progress in Optimization of Metallic Substrate Surface by Chemical Solution Method

作　　者：孙梅娟 韩修林 唐义甲 Sun Meijuan;Han Xiulin;Tang Yijia(School of Physics and Electronic Engineering,Fuyang Normal University,Anhui,Fuyang,236037,China)

机构地区：[1]阜阳师范大学物理与电子工程学院,安徽阜阳236037

出　　处：《仪器仪表用户》2021年第2期19-22,18,共5页Instrumentation

基　　金：安徽省高校自然科学重点项目(KJ2019A0522);光电材料科学与技术安徽省重点实验室开放课题(OMST201907)。

摘　　要：第二代高温超导YBCO带材具有优异的无损电传输性能,是当前实用化超导材料研究的热点之一。YBCO超导带材的关键是实现双轴织构,在常用的3种双轴织构技术中,IBAD(离子束辅助沉积技术)由于织构度高、金属基带成本低、生产效率高而被广泛使用。有研究资料表明,金属基带表面的平坦程度直接影响IBAD-MgO薄膜织构。因此,为获得织构优良的IBAD-MgO薄膜,必须对金属基带表面进行平坦化处理。化学溶液法对金属基带进行平整化是近几年新兴的金属基带表面优化方式,具有低成本、高效率、材料利用率高、易于产业化和环境友好等优势,已成为各国科学家研究的热点。本文系统地介绍了化学溶液法的发展历史、原理,以及近几年国际上主流研发单位的最新研究进展。The second generation high-temperature superconducting YBCO tapes is one of the hot topics in the research of practical superconducting materials due to its lossless power transmission quality.The key issue for high performance YBCO superconductors is the realization of biaxial texture.Among the three commonly used techniques for fabrication of biaxially-textured buffers,IBAD(ion beam-assisted deposition)is widely used due to its high texture,low cost,and high efficiency.Researches show that,excellent biaxially textured MgO film can only be obtained on atomic level flat metal substrate.Therefore,it is significant to polish the surface of the metal substrate.The chemical solution method is a new route to planarize substrates in recent years,which has attached more and more attention over the world,for its low cost,high efficiency,high material utilization,easy industrialization and environmental friendliness characteristics.This paper reviews the development history and principles of chemical solution method,as well as recent research progress of international mainstream R&D units systematically.

关 键 词：涂层导体 溶液沉积平整化 非晶氧化物薄膜 离子束辅助沉积 

分 类 号：O611.6[理学—无机化学]