惯性式多自由度压电作动器的结构设计与实验  

Structure Design and Experiment of Inertial Multi-Degree-of-Freedom Piezoelectric Actuator

作　　者：郑科 邱建敏[1] 王一平[1] 杨颖[1] ZHENG Ke;QIU Jian-min;WANG Yi-ping;YANG Ying(School of Aeronautics,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京航空航天大学航空学院,南京210016

出　　处：《微特电机》2021年第2期15-20,共6页Small & Special Electrical Machines

摘　　要：提出了一种惯性式多自由度压电作动器,该作动器利用梁的面内二阶弯振和面外二阶弯振作为工作模态,以锯齿波作为激励电信号,依靠转子的惯性力,克服滑动摩擦力驱动转子绕Z轴和α,β,γ轴旋转。分析了惯性式多自由度压电作动器的驱动机理,并利用Comsol Multiphysics 5.3a对压电振子进行了分析,确定了压电振子的工作模态。实验样机的机械特性实验结果表明,作动器绕Z轴和绕α,β,γ轴旋转的最优工作频率分别为46.8 kHz和80.1 kHz。在电压有效值为60 V的条件下,作动器绕Z轴旋转的最高转速可达162 r/min,堵转扭矩可达1 mN·m;绕α,β,γ轴旋转的最高转速分别可达305 r/min,310 r/min和300 r/min,堵转扭矩可达2 mN·m。作动器绕α,β,γ轴旋转的角度范围可达±36°。惯性式多自由度压电作动器结构紧凑,极大地减小了现有多自由度压电作动器的体积,可应用于姿态调整、类人机器人眼球和精密指向系统等领域。An inertial multi-degree-of-freedom piezoelectric actuator was proposed. The actuator used the in-plane 2 th bending vibration and the out-of-plane 2 th bending vibration of the beam as the working modes, and used the sawtooth wave as the excitation electrical signal. The inertial force overcame the sliding friction force to drive the rotor to rotate around theZaxis,α,β and γ axes. The driving mechanism of the inertial multi-degree-of-freedom piezoelectric actuator was analyzed, and the piezoelectric vibrator was analyzed by Comsol Multiphysics 5.3 a, and the working mode of the piezoelectric vibrator was determined. The experimental results of the mechanical characteristics of the experimental prototype showed that the optimal operating frequencies of the actuator around theZaxis and around theα,β and γ axes were 46.8 kHz and 80.1 kHz, respectively. Under the condition that the effective value of the voltage was 60 V, the maximum rotation speed of the actuator around theZaxis could reach 162 r/min, and the locked-rotor torque could reach 1 mN·m;the maximum rotation speed around theα,β, andγaxes could reach respectively 305 r/min, 310 r/min and 300 r/min, locked-rotor torque could reach 2 mN·m. The angle range of the actuator aroundα,β, andγaxes could reach ±36°. The inertial multi-degree-of-freedom piezoelectric actuator had a compact structure, which greatly reduced the volume of the existing multi-degree-of-freedom piezoelectric actuator, and could be used in fields such as attitude adjustment, humanoid robot eyeballs, and precision pointing systems.

关 键 词：压电陶瓷 压电作动器 惯性驱动 锯齿波驱动 

分 类 号：TM359.9[电气工程—电机]