掺杂类金刚石薄膜微观结构和摩擦学性能的研究进展  

Research Progress on Microstructure and Tribological Properties of Doped Diamond-like Carbon Films

作　　者：汪科良 周晖[1] 张凯锋[1] 贵宾华 蒋钊[1] 张延帅[1] 刘兴光 郑玉刚[1] WANG Ke-liang;ZHOU Hui;ZHANG Kai-feng;GUI Bin-hua;JIANG Zhao;ZHANG Yan-shuai;LIU Xing-guang;ZHENG Yu-gang(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《表面技术》2021年第2期148-159,共12页Surface Technology

基　　金：中央军委装备发展部装备预研重点基金项目(61409230603);国防科技重点实验室基金(HTKJ2018KL510003)。

摘　　要：类金刚石(Diamond like carbon,DLC)薄膜具有高硬度、低摩擦系数、低磨损率的特点,已广泛应用于各行各业,但也存在内应力大、热稳定性差以及摩擦学性能对环境敏感等问题,制约了DLC薄膜的应用。在DLC薄膜中,掺入异质元素能够改变薄膜成分、微观结构和sp3杂化键含量,可有效地减小薄膜内应力,提高结合力并改善摩擦学性能。首先介绍了掺杂DLC薄膜的起源和制备方法,简要分析了各种制备方式的优缺点,并从掺杂元素在DLC薄膜中的存在形式和sp3杂化键含量两个方面,讨论了掺杂对DLC薄膜微观结构的影响,并简要介绍了掺杂对DLC薄膜机械性能的影响。金属元素掺入DLC薄膜后,以原子溶解、单质纳米晶或金属碳化物纳米晶的形式,分布于非晶基体中;非金属元素掺入DLC薄膜后,主要以原子溶解形式溶于非晶基体。随后,系统讨论了掺杂对DLC薄膜摩擦学性能的影响。S、Ag元素的掺入能够有效减小真空环境下DLC薄膜的摩擦系数;B、N、F、Si或过渡金属的掺入能够提高DLC薄膜的热稳定性,拓宽DLC薄膜的使用温度范围;Si、F、B以及钛等过渡金属元素的掺入能够降低DLC薄膜摩擦学性能对湿度的敏感性。最后,提出了多元素掺杂和多种方法联合应用是DLC薄膜未来的重点研究方向。Diamond-like carbon(DLC)films have been widely used in various industries due to high hardness,low coefficient of friction,and superior wear resistance.However,their applications are limited by the large internal stress,poor thermal stability,and environmental sensitivity of tribological properties.The doping of heterogeneous elements into DLC films can change the film composition,microstructure,and sp3 hybrid bond content,which can effectively reduce the internal stress,improve the bonding force,and improve the tribological properties.First,the origin and preparation methods of the doped DLC films are briefly introduced,and the advantages and disadvantages of various preparation methods are briefly analyzed.Second,the effects of doping on the microstructure of DLC films are discussed from the aspects of the presence of doping elements in DLC films and the sp3 hybrid bond content,and the effects of doping on the mechanical properties of DLC films are also briefly introduced.After being doped into DLC films,the metal elements are distributed in the amorphous matrix in the form of atomic dissolution,elemental nanocrystals or metal carbide nanocrystals,and the non-metal elements are mainly distributed in the amorphous matrix in the form of atomic dissolution.Third,the effects of doping on the tribological properties of DLC films are systematically discussed.The coefficient of friction of DLC films under vacuum can be effectively reduced by doping S and Ag elements;the thermal stability of DLC films can be improved by doping B,N,F,Si or transition metals,thus broadening the operating temperature range of DLC films;the environmental sensitivity of tribological properties of DLC films can be effectively reduced by doping Si,F,B and transition metals such as titanium.Finally,multi-element doping and combined application of multiple methods are proposed as the key future research directions of DLC films.

关 键 词：类金刚石薄膜 掺杂 制备工艺 微观结构 摩擦学性能 

分 类 号：TG174.4[金属学及工艺—金属表面处理] TH117.1[金属学及工艺—金属学]