高纯气体管路系统颗粒物产生原因分析及防治  

Cause Analysis and Prevention of Particles in High Purity Gas Pipeline System

作　　者：刘见华[1,2,3] 万烨 赵雄[1,2,3] 赵宇 王磊[2,3] 严大洲 LIU Jian-hua;WAN Ye;ZHAO Xiong;ZHAO Yu;WANG Lei;YAN Da-zhou

机构地区：[1]中国恩菲工程技术有限公司,北京100038 [2]洛阳中硅高科技有限公司,河南洛阳471023 [3]多晶硅材料制备技术国家工程实验室,河南洛阳471023

出　　处：《有色冶金节能》2020年第6期25-29,共5页Energy Saving of Nonferrous Metallurgy

摘　　要：精密加工制造中颗粒物含量影响产品质量和成品率,是评价高纯系统的重要指标之一。高纯管路系统的颗粒物来自于高纯材料的制造、管道材料表面的杂质、产品气体自身携带的污染物、控制阀门和过滤器、施工安装产生的污染。通过分析颗粒物来源,从材料的纯化、表面处理、阀门和过滤器选型、焊接质量控制、管道安装、预制加工作业环境的洁净度控制几方面提出颗粒物防治措施建议。Particle content is one of the important indicators of high purity system,which has a great influence on the product quality and product rate.The particles of high purity pipeline system come from the manufacture of high purity materials,impurities on the surface of pipeline materials,pollutants carried by product gas itself,control valves and filters,and pollution caused by construction and installation.By analyzing the source of particles in high purity system,some suggestions on the prevention were put forward from the aspects of materials purification,surface treatment,valves and filters selection,welding quality control,pipe installation and cleanness control of prefabrication working environment.

关 键 词：高纯气体 颗粒物 管路系统 洁净度 

分 类 号：TU834.8[建筑科学—供热、供燃气、通风及空调工程]