压电阀中的微位移放大机构  

Micro-displacement Amplification Mechanism in Piezoelectric Valve

作　　者：华顺明 张宇 彭宇 王义强 HUA Shunming;ZHANG Yu;PENG Yu;WANG Yiqiang(College of Mechanical and Energy Engineering,Ningbo-Tech University,Ningbo 315100,China;School of Mechanical Engineering,Zhejiang University,Hangzhou 310027,China;Ningbo Bolev Hydraulics Co., Ltd, Ningbo 315502, China)

机构地区：[1]浙大宁波理工学院机电与能源工程学院,浙江宁波315100 [2]浙江大学机械工程学院,浙江杭州310027 [3]宁波市博尔法液压有限公司,浙江宁波315502

出　　处：《压电与声光》2021年第1期134-141,共8页Piezoelectrics & Acoustooptics

基　　金：宁波市科技创新2025重大专项基金资助项目(No.2019B10052);浙江省自然科学基金资助项目(No.LY16E050009);宁波市自然科学基金资助项目(No.2017A610091)。

摘　　要：压电陶瓷材料具有优良的力学性能和响应特性,将其作为智能执行器应用于液压阀中,是持续多年的研究热点。但压电驱动器输出仅为微米级,难以直接满足液压阀的使用要求,因此需要设计相应的微位移放大机构。首先,重点介绍了柔性铰链放大机构及其在压电阀中的典型应用,根据原理可分为杠杆、三角、桥式等放大形式;其次,归纳了基于液压放大和晶片放大机构的两类压电阀的代表性结构和性能特点;最后,分析对比了三类放大机构应用于压电阀中的优缺点。结果表明,铰链放大结构简单,再现性好;液压放大占用空间小,频带宽,倍数高;晶片放大频响高,只适用于伺服和先导控制。The piezoelectric ceramic materials have excellent mechanical properties and response characteristics.It has been a research hotspot for many years to use them as intelligent actuators in hydraulic valves.However,the output displacement of piezoelectric actuator is only micrometer,which is difficult to meet the use requirements of hydraulic valve,so it is necessary to design the corresponding micro displacement amplification mechanism.Firstly,the flexure hinge amplification mechanism and its typical applications in piezoelectric valve are introduced.According to the principle,the flexure hinge amplification mechanism can be divided into lever,triangle and bridge types.Secondly,the representative structure and performance characteristics of two kinds of piezoelectric valve based on hydraulic amplifier and bimorph amplifier are summarized.Finally,the advantages and disadvantages of the applications of the three types of amplification mechanism to the piezoelectric valve are analyzed and compared.The results show that the hinge amplification mechanism has a simple structure and good reproducibility;the hydraulic amplifier occupies a small space,has a wide frequency bandwidth and a high multiple;the bimorph amplifier has a high frequency response and is only suitable for servo and pilot control.

关 键 词：压电阀 放大机构 柔性铰链 液压放大 压电晶片 

分 类 号：TN384[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]