微型半球陀螺平面电极装配方法设计  

An Assembly Method for Micro-scale Shell Resonator Gyroscope with Out-of-plane Electrodes

作　　者：杨峰[1,2,3] 梅松 林丙涛 肖凯[1,2,3] 雷霆 方海斌[1,2,3] YANG Feng;MEI Song;LIN Bingtao;XIAO Kai;LEI Ting;FANG Haibin(The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060,China;Solid Inertial Technology Enterprise Engineering Technology Research Center of Chongqing City, Chongqing 401332, China;Solid Inertial Technology Engineering Laboratory of Chongqing City, Chongqing 401332, China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060 [2]重庆市固态惯性技术企业工程技术研究中心,重庆401332 [3]重庆市固态惯性技术工程实验室,重庆401332

出　　处：《压电与声光》2021年第1期142-145,共4页Piezoelectrics & Acoustooptics

摘　　要：微型半球陀螺采用静电激励和电容检测技术实现陀螺的振型控制及信号读取,电容间隙的装配工艺是陀螺的关键工艺之一。该文对采用平面电极的微型半球陀螺装配工艺进行了探索,并根据谐振子的结构尺寸计算了装配误差的控制范围,设计了一种采用精密垫片实现微小间隙的装配方法,该方法通过垫片的厚度控制电容间隙。对采用此方法装配的陀螺电容间隙进行测量,并测试了封装后的陀螺性能,结果表明,电容间隙可控制在(12±3)μm。在力平衡模式下,陀螺样机的零偏稳定性达7.3(°)/h,量程为±300(°)/s,验证了装配方法的可行性。The micro shell resonator gyroscope uses the electrostatic excitation and capacitance detection technology to realize the vibration control and signal pick-up of the gyroscope,thus the assembly technology of control capacitance gap is one of the key technologies of gyroscope.In this paper,the assembly process of micro shell resonator gyroscope with out-of-plane electrodes is explored,and the range of capacitance gap error is calculated according to the structure parameters of resonator,and an assembly method of micro gap is designed by using precision shims,which control gap through the thickness of shim.The capacitance gap by this method is measured,and performance of the micro shell resonator gyroscope is tested.The results show the range of capacitance gap can be controlled at(12±3)μm.In the force-rebalance mode,the bias stability of the gyroscope is 7.3(°)/h,and the measuring range is±300(°)/s.The feasibility of this assembly method is verified.

关 键 词：微型半球陀螺 平面电极 装配方法 精密垫片 零偏稳定性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]