基于分次吹制工艺的微半球陀螺制作  

Fabrication of Micro-Hemispherical Gyroscope Based on Fractional Blowing Technology

作　　者：张桐 邓江涛 杨峰[1] 梅松 肖凯[1] 林丙涛[1] 韩世川[1] 林翠平 ZHANG Tong;DENG Jiangtao;YANG Feng;MEI Song;XIAO Kai;LIN Bingtao;HAN Shichuan;LIN Cuiping(The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060,China;Emicore Co.Ltd, Zhuhai 519040,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060 [2]麦格磁电科技有限公司,广东珠海519040

出　　处：《压电与声光》2021年第1期146-148,156,共4页Piezoelectrics & Acoustooptics

摘　　要：提出了一种微半球谐振子分次吹制工艺新方法,通过增加第二次旋转吹制的方式,以补偿第一次吹制过程中由于温度场不均匀性造成的谐振子对称度误差。设计了微半球陀螺整体工艺方案,并制作了硼硅酸玻璃材质的微半球谐振子及陀螺样品,测试结果表明,分次吹制后的谐振子频差由单次吹制的30~60 Hz降至10 Hz以内。经与力平衡控制电路联调,陀螺零偏不稳定性为8.2(°)/h。A new method for fractional blowing of micro-hemispherical resonator is proposed.By adding a second rotary blowing method,the symmetry error of the resonator caused by the non-uniformity of the temperature field inhomogeneity during the first blowing can be compensated.The whole process scheme of the micro hemispherical gyroscope is designed,and the resonator made of borosilicate glass and the gyroscope prototype is manufactured.The test results show that the frequency difference of resonators after the fractional blowing were reduced from 30~60 Hz to less than 10 Hz.The bias instability of gyro reaches 8.2(°)/h through the joint adjustment with the force-rebalance mode control.

关 键 词：分次吹制 微半球陀螺 硼硅酸玻璃 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]