基于差分吸收检测技术的非分散红外CO_(2)呼吸气体传感器  

Non-dispersive infrared CO_(2) breathing gas sensor basedon differential absorption detection technology

作　　者：袁博[1] 袁宇鹏 张祖伟 杨靖[2,3] 黄诗田 柯淋[4] 张开盛 罗文博 YUAN Bo;YUAN Yupeng;ZHANG Zuwei;YANG Jing;HUANG Shitian;KE Lin;ZHANG Kaisheng;LUO Wenbo(School of Electronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 611731,P.R.China;Chongqing Acoustic-Optic-Electronic Co.Ltd,China Electronics Technology Group,Chongqing 401332,P.R.China;26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,P.R.China;Chengdu Junling Kechuang Technology Co.Ltd,Chengdu 610015,P.R.China)

机构地区：[1]电子科技大学电子科学与工程学院,成都611731 [2]中电科技集团重庆声光电有限公司,重庆401332 [3]中国电子科技集团公司第二十六研究所,重庆400060 [4]成都君凌科创科技有限公司,成都610015

出　　处：《重庆邮电大学学报（自然科学版）》2021年第1期118-125,共8页Journal of Chongqing University of Posts and Telecommunications(Natural Science Edition)

基　　金：国家重点研发计划(2017YFB0406404)。

摘　　要：采用非分散红外(non-dispersive infrared,NDIR)气体传感器实时检测呼吸气体中的CO_(2)气体浓度,进而反映人体运动机能和代谢功能等身体状态,可以满足人类日益增强的对自身健康状况进行了解的需求。利用电调制微机电系统(micro-electro-mechanical system,MEMS)光源和双通道热释电传感器分别作为红外光源和探测器,采用气室结构设计和压电微泵相结合的方法为传感器提供稳定的气体流速,设计出红外呼吸CO2气体传感器。通过测量不同CO_(2)标准气体浓度下热释电传感器参考通道和测量通道的电压比值进行传感器标定,获得了在室温下、检测量程0%~8%内,绝对误差小于0.5%,相对误差3%,系统响应时间小于1.5 s的传感器,提高了基于NDIR气体传感器检测呼吸气体的抗干扰能力,可望满足运动机能和代谢功能检测等应用对CO_(2)气体监测的需求。The non-dispersive infrared(NDIR)gas sensor is used to detect the concentration of respiratory CO_(2) in real time,and thereby reflect the physical state of the human body’s motor function and metabolic function,which can meet the growing needs of people to understand their own health conditions.In this paper,an electrically modulated micro-electro-mechanical system(MEMS)light source and a dual-channel pyroelectric sensor are used as an infrared light source and detector respectively.The gas chamber structure design and the piezoelectric micropump are combined to provide a stable gas flow rate for the sensor.By measuring the voltage ratio of the reference channel and the measuring channel of the pyroelectric sensor under different CO_(2) concentrations,the sensor calibration is obtained at room temperature,in the range of 0%~8%of the detection range,the absolute error is less than 0.5%,and the relative error is 3%and the response time of the gas sensor is less than 1.5 s.The anti-interference ability of the NDIR gas sensor to detect the breathing CO2 is improved,and it is expected to meet the demand for CO_(2) gas monitoring in applications such as motor function and metabolic function detection.

关 键 词：CO_(2) 气体传感器 压电微泵 呼吸检测 差分检测 

分 类 号：TP21[自动化与计算机技术—检测技术与自动化装置]