HL-2M装置真空室预抽气系统的研制  

Development of Pre-pumping System for Vacuum Chamber of HL-2M

作　　者：蔡潇[1] 曹曾[1] 张炜[1] 李瑞鋆 黄勇 CAI Xiao;CAO Zeng;ZHANG Wei;LI Rui-jun;HUANG Yong(Southwestern Institute of Physics,Chengdu 610041,China)

机构地区：[1]核工业西南物理研究院,四川成都610041

出　　处：《真空》2021年第1期33-37,共5页Vacuum

基　　金：国家重点研发项目:面向ITER壁在线原位清洗和处理的新技术研究(2017YFE0301305)。

摘　　要：通过搭建HL-2M真空室整体预抽气系统,对真空室的设计、加工和安装工艺是否达到超高真空技术要求进行了试验检测。采用三套分子泵机组和一套低温泵机组作为主抽系统,对HL-2M真空室进行了预抽,72小时后真空室真空度达到3.7×10^(-5)Pa,超过了预期的预抽真空度。在本底真空度为3.7×10^(-5)Pa的条件下采用静态定容法测试真空室漏放气率,结果显示真空室漏气率为2.3×10^(-7)Pa·m^(3)·s^(-1),小于HL-2A真空室预抽时总漏放气率两个量级。试验证明通过合理的抽气机组配置,HL-2M装置真空室满足超高真空技术要求,为将来开展高品质等离子体实验提供了良好的条件。In order to check whether the design, manufacture and assembly of the HL-2M vacuum vessel meet the ultrahigh vacuum requirement, a pumping system was established in the factory to test the vacuum performance of HL-2M vacuum vessel after pre-assembly. Pumping by a primary pumping system with three molecular pump and a cryo-pump, the pressure in the vacuum vessel reaches 3.7 ×10^(-5) Pa after 72 hours, which is better than the expected value. After that, the total leak and outgassing rate is tested by static constant volume method. The result shows that, the total leak rate is 2.3×10^(-7)Pa·m^(3)·s^(-1), which is lower than that of HL-2A by two orders of magnitude. The test shows that with reasonable pumping system setting, the ultrahigh vacuum condition of HL-2M is achieved, which will provide a favorable condition for its future plasma operation.

关 键 词：超高真空 漏气率 流导 有效抽速 

分 类 号：TL628[核科学技术—核技术及应用]