永磁体内嵌式超洁净阀及其优化设计方法  

Permanent Magnet Embedded Ultra-clean Valve and Its Optimization Design Method

作　　者：刘明潇 胡亮[1] 傅新[1] LIU Ming-xiao;HU Liang;FU Xin(The State Key Lab of Fluid Power and Mechatronic System, Zhejiang University, Hangzhou, Zhejiang 310027)

机构地区：[1]浙江大学流体动力与机电系统国家重点实验室,浙江杭州310027

出　　处：《液压与气动》2021年第3期33-39,共7页Chinese Hydraulics & Pneumatics

摘　　要：面向半导体、生物医药、电子级化工等领域的超洁净流控需求,提出了一种新的永磁体内嵌式超洁净阀结构。将永磁体嵌入超洁净材料(如超纯全氟树脂)所制的阀芯内,通过阀腔外部的永磁体驱动阀芯启闭,从而实现液体介质的超洁净控制。阐述了该超洁净阀的工作原理及优势,对其流量-压损特性进行了仿真计算,并通过不同开口下流体介质对阀芯作用力与阀腔内外永磁体间磁场作用力的计算,对阀芯受力特性进行了分析,验证了永磁体内嵌式超洁净阀方案的可行性。进而,为改善阀芯启闭与控制特性,对驱动磁场进行了优化设计,并通过仿真验证了其有效性。In order to meet the requirements of ultra-clean flow control in the fields of semiconductor and biomedicine,a new permanent magnet(PM)embedded ultra-clean valve is proposed.The control of ultra-clean liquid is realized by embedding the PM into the valve core,which is made by ultra-clean material(such as ultra-pure perfluororesin)and can be driven by moving of the PM outside the chest.The working principle of the propsed valve is presented firstly,and then its flow-pressure loss characteristics are analyzed by simulation.Besides,through calculating the fluid force and the magnetic force acting on the valve core under different spool positions,the feasibility of the idea is verified.Furthermore,to improve the opening and closing characteristics of the valve,the design of the driving magnetic field is optimized,which is proven to be effective by simulation.

关 键 词：半导体 超洁净 阀 永磁体内嵌 

分 类 号：TH137[机械工程—机械制造及自动化]