一种柔性X-Y-Z-θ_(z)四自由度位移传感器的设计与实验  

Design and Experiment of a Flexible X-Y-Z-θ_(z) Four-Degree-of-Freedom Displacement Sensor

作　　者：祖洪飞 潘奔 彭来湖[1] ZU Hongfei;PAN Ben;PENG Laihu(Faculty of Mechanical Engineering&Automation,Zhejiang Sci-Tech University,Hangzhou Zhejiang 310018,China)

机构地区：[1]浙江理工大学机械与自动控制学院,浙江杭州310018

出　　处：《传感技术学报》2020年第12期1691-1697,共7页Chinese Journal of Sensors and Actuators

基　　金：浙江省重点研发计划项目(2019C01038);浙江省自然科学基金项目(LQ20E050020);浙江理工大学科研启动基金项目(18022219-Y);浙江理工大学青年创新专项项目(20022119-Y);2020年度浙江省博士后科研择优项目(ZJ2020102)。

摘　　要：现有多自由度位移测量大部分是通过多个位移传感器组合而实现的,致使其多轴累积误差过大。针对这一问题,提出一种基于单个弹性体感知元件来实现X-Y-Z-θ_(z)四自由度位移测量的新方法并进行了实验验证。其中,弹性体采用大应变柔性材料,依据其移动端位移与固定端应变的对应关系,并通过设计应变片布片方案及电桥连接方式,获得了完善的四自由度位移测量方案,且较好地解决了四个被测参数之间的耦合问题。实验结果表明:X、Y、Z、θ_(z)四个位移量单独测量时,其测量误差分别为2.86%、2.57%、2.33%、1.08%;同时测量多个位移参数时,传感器也能准确地实现每个位移量的测量,且平均测量误差低于4%。Most of the existing multi-degree-of-freedom displacement measurement are realized by a combination of multiple displacement sensors,which causes its multi-axis accumulative error to be too large. To solve this problem,a new method of X-Y-Z-θ_(z) four-degree-of-freedom displacement measurement based on a single elastomer sensing element is proposed and verified by experiments. The elastomer adopts a large-strain flexible material,according to the corresponding relationship between the displacement of the moving end and the strain of the fixed end,and through the design of strain gauge cloth scheme and bridge connection mode,a perfect four-degree-of-freedom displacement measurement scheme is obtained,and the coupling problem between the four measured parameters is well solved. The experimental results show that when X,Y,Z,θ_(z) are measured separately the measurement errors are 2.86%,2.57%,2.33%,1.08%,respectively. When measuring multiple displacement parameters simultaneously,the sensor can also accurately measure each displacement,and the average measurement error is less than 4%.

关 键 词：位移传感器 四自由度 应变片布置 柔性材料 大应变 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]