TiAlN/TiN纳米多层涂层的高温稳定性研究  

Research on the High-temperature Thermal Stability of TiAlN/TiN Nano-multilayered Coatings

作　　者：楼玉民 赵宁宁 黄一君 董学超 陈利 岳建岭 Lou Yumin;Zhao Ningning;Huang Yijun;Dong Xuechao;Chen Li;Yue Jianlin(Zhejiang Energy Group R&D Institute Co.,Ltd.,Hangzhou Zhejiang 310003,China;Zhejiang Key Laboratory of Research on High Efficiency Energy Saving and Pollutant Control Technology of Thermal Power Generation,Hangzhou Zhejiang 311121,China;Powder Metallurgy Research Institute,Central South University,Changsha Hunan 410083,China)

机构地区：[1]浙江浙能技术研究院有限公司,浙江杭州310003 [2]浙江省火力发电高效节能与污染物控制技术研究重点实验室,浙江杭州311121 [3]中南大学粉末冶金研究院,湖南长沙410083

出　　处：《硬质合金》2020年第6期409-416,共8页Cemented Carbides

基　　金：浙能集团科技项目(JSYJY-JS-2019-059)。

摘　　要：本文采用反应磁控溅射技术制备了TiAlN/TiN纳米多层涂层,利用XRD、SEM、TEM和纳米力学探针方法表征了多层涂层不同温度真空退火处理前后的微结构和硬度的变化。结果表明:随着退火温度的升高,沉积态TiAlN(4.5 nm)/TiN(1.5 nm)纳米多层涂层中TiAlN层和TiN之间的共格界面会逐渐转变为半共格界面,直至1200℃时因原子扩散而变的模糊不清。退火过程中,TiAlN单层涂层和TiAlN/TiN纳米多层涂层由于其中TiAlN发生调幅分解析出c-AlN而使涂层硬度不断升高,超过一定温度c-AlN开始转变为h-AlN并导致涂层硬度迅速下降。当退火温度达到1000℃后,TiAlN/TiN纳米多层涂层的硬度开始高于相应单层TiAlN涂层。相比于TiAlN单层涂层,TiAlN/TiN纳米多层涂层中的界面应变有助于抑制其中亚稳相c-AlN向稳定相h-AlN的转变,因而具有更好的高温稳定性。TiAlN/TiN nano-multilayered coating was prepared by the magnetron sputtering method,and its microstructure and hardness change induced by the vacuum annealing treatment at different temperatures were analyzed using XRD,SEM,TEM and nano-indentation.The results show that the coherent interface structure between TiAlN and TiN layers in TiAlN(4.5 nm)/TiN(1.5 nm)nano-multilayered coating turned into a semi-coherent interface structure with the increase of annealing temperature,and it was difficult to distinguish the modulation structure for the atom diffusion at 1200℃.During the annealing process,the hardness of both TiAlN single-layer coating and TiAlN/TiN nano-multilayered coating gradually increased due to the formation of c-AlN from spinodal decomposition of TiAlN,and began to decline sharply due to the transformation from c-AlN into h-AlN.When the annealing temperature exceeds 1000℃,the hardness of TiAlN/TiN nanomultilayered coating was higher than that of the single-layer TiAlN coating.It could be included that TiAlN/TiN nanomultilayer exhibit higher thermal stability than TiAlN single layer coating,for the interfacial strain between TiAlN and TiN layer contribute to restrain the transformation from metastable c-AlN into the stable h-AlN structure.

关 键 词：磁控溅射 TiAlN/TiN 纳米多层涂层 退火温度 高温稳定性 

分 类 号：TG174.4[金属学及工艺—金属表面处理]