微半球谐振陀螺频率修调技术研究进展  

Advance of frequency-trimming methods of micro hemispherical resonator gyroscope

作　　者：卢坤 肖定邦[1] 石岩 席翔 吴学忠[1] LU Kun;XIAO Dingbang;SHI Yan;XI Xiang;WU Xuezhong(College of Intelligence Science,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]国防科技大学智能科学学院,长沙410073

出　　处：《微纳电子与智能制造》2020年第4期59-64,共6页Micro/nano Electronics and Intelligent Manufacturing

基　　金：国家自然科学基金(51935013)项目资助。

摘　　要：微半球谐振陀螺是一种基于微机电系统(micro-electro-mechanical systems,MEMS)工艺的高精度微陀螺,具有精度高、体积小、功耗低等显著优点,是高性能微机电陀螺的重要发展方向之一。目前,国内外报道的微半球谐振陀螺品质因数已超过500万,零偏不稳定性已达到导航级指标(0.01°/h),显示出了极大的性能潜力优势。随着微半球谐振陀螺结构尺寸与体积不断减小,其相对制造误差更加凸显,具体表现为陀螺工作模态频率裂解误差,这将直接导致陀螺输出零偏漂移与噪声增大,严重制约陀螺综合性能提升。频率修调技术是微半球谐振陀螺制造过程中的核心工艺之一,不同于传统的机械加工方法,受材料与结构尺寸限制,必须要开发新的修调工艺。介绍了多种微半球谐振陀螺的频率修调方法,对比分析了不同工艺特点,并对微半球谐振陀螺修调技术发展趋势进行了总结与展望。Micro hemispherical resonator gyroscope(mHRG)is a high-precision micro gyroscope based on the MEMS process,which has the advantages of high precision,small volume and low power consumption.It is one of the most important development directions among high-performance MEMS gyroscopes.At present,the quality factor(Q-factor)of mHRG reported at home and abroad has been over 500 million.The bias instability of mHRG has reach navigation level(0.01°/h),which shows the great potential and advantages.With the structural sizes and volume of the mHRG obviously decreasing,the manufacturing errors become more prominent,which manifests as frequency splitting in operating modes.Frequency trimming is one of the core techniques during the fabrication process of mHRG.Different from the conventional mechanical processes,it is necessary to develop new trimming methods limited by material and structural sizes.In this paper,several frequencies trimming methods for mHRG are introduced,its technical characteristics are compared and analyzed,and its future development trend is described.

关 键 词：微半球谐振陀螺 频率裂解 模态匹配 频率修调 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]