基于电容微位移感知单元的多维力感知机构分析与设计  

Analysis and design of the multi-dimensional force-sensing mechanism based on the capacitive micro-displacement sensing unit

作　　者：蔡大军[1,2] 尹航 陈雷 许允斗[1,4] 姚建涛[1,4] CAI Da-jun;YIN Hang;CHEN Lei;XU Yun-dou;YAO Jian-tao(Hebei Laboratory of Parallel Robot and Mechatronic System,Yanshan University,Qinhuangdao 066004;Engineering Training Center,Yanshan University,Qinhuangdao 066004;CITIC Dicastal Co.,Ltd.,Qinhuangdao 066011;Key Laboratory of Advanced Forging&Stamping Technology and Science,Ministry of Education,Yanshan University,Qinhuangdao 066004)

机构地区：[1]燕山大学河北省并联机器人与机电系统实验室,河北秦皇岛066004 [2]燕山大学工程训练中心,河北秦皇岛066004 [3]中信戴卡股份有限公司,河北秦皇岛066011 [4]燕山大学先进锻压成形技术与科学教育部重点实验室,河北秦皇岛066004

出　　处：《机械设计》2020年第12期43-50,共8页Journal of Machine Design

基　　金：国家自然科学基金(51675459);河北省自然科学基金京津冀合作专项(E2017203387);河北省高校百名优秀创新人才支持计划(SLRC2019039);河北省省级科技计划国际科技合作基地建设专项(19391828D)资助项目。

摘　　要：提出了一种可以测量六维微位移的电容式感知单元,可将部件间的六维位移转化成可识别的电容信号。首先对提出的微位移感知单元进行了分析,推导出了从二维微位移感知单元到六维力感知单元的解耦关系式;其次针对提出的多维力感知机构弹性体进行了刚度建模,推导出了多维力与微位移之间的映射矩阵,并推导出误差矩阵;最后对多维力感知机构进行了虚拟标定,分析了误差产生的可能原因。该电容六维力传感器具有较小的理论误差和较高的可行度,为该领域后续的设计研究奠定了一定的基础。This article focuses on a capacitive sensing unit capable of measuring six-dimensional micro-displacement,which converts the six-dimensional displacement among components into recognizable capacitive signals.First,the micro-displacement sensing unit is analyzed,and the decoupling relationship from the two-dimensional micro-displacement sensing unit to the six-dimensional force-sensing unit is derived.Second,the stiffness modeling of the multi-dimensional force-sensing mechanism’s elastic body is conducted.The mapping matrix between the multi-dimensional force and the micro-displacement is derived,and its error matrix is worked out.Finally,the multi-dimensional force-sensing mechanism is subject to virtual calibration,and possible causes of the error are explored.This capacitive six-dimensional force sensor has minor theoretical error and ensures higher feasibility,thus laying a solid foundation for future design and research in this field.

关 键 词：多维力感知机构 微型电容 微位移感知单元 映射 

分 类 号：TH39[机械工程—机械制造及自动化]