压阻式小量程SOI加速度敏感芯片设计与分析  

Design and Analysis of Piezoresistive SOI Acceleration Sensitive Chip with Small Range

作　　者：杨宇新 揣荣岩[1] 张冰 李新[1] 张贺[1] YANG Yu-xin;CHUAI Rong-yan;ZHANG Bing;LI Xin;ZHANG He(School of Information Science and Engineering,Shenyang University of Technology,Shenyang 110870,China)

机构地区：[1]沈阳工业大学信息科学与工程学院,辽宁沈阳110870

出　　处：《仪表技术与传感器》2021年第2期28-31,40,共5页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(61372019);辽宁省高等学校基本科研项目(LFGD2017015)。

摘　　要：为满足建筑物振动监测等应用对小加速度信号测量的需求,采用带有微梁和支撑梁的敏感结构设计了一种压阻式小量程加速度传感器芯片,为弥补压阻式传感器测量小信号精度低这一不足,基于SOI技术设计了单晶硅应变电阻。利用有限元法对敏感芯片结构进行了仿真分析,给出了兼顾灵敏度与固有频率这两个技术指标的设计方法,以此确定了敏感芯片的尺寸参数,并分析了结构的响应特性。仿真结果表明,所设计量程为0.1g的加速度敏感芯片,其满量程输出约为34 mV,固有频率约264.3 Hz,交叉耦合为1.4%,过载可达87倍量程。In order to meet the needs of measurement of small acceleration signals in building vibration monitoring and other applications,a piezoresistive acceleration sensor chip with small range was designed by using the sensitive structure with micro-beams and support beams.Based on the SOI technology,the monocrystalline silicon strain resistance was designed to make up for the shortcomings of low precision of piezoresistive sensors in measuring small signals.Through the analysis for the finite element simulation of the sensitive chip structure,the design method that takes into account the two technical indicators of sensitivity and natural frequency was proposed,the size parameters of the sensitive chip were determined,and the response characteristics of the structure were analyzed.The simulation results show that the designed acceleration sensitive chip with a range of 0.1g has a full scale output voltage of about 34 mV,its natural frequency and cross-coupling are about 264.3 Hz and 1.4%,respectively,and the overload can reach up to eighty seven-fold of the full scale.

关 键 词：加速度传感器 小量程 敏感微梁 过载能力 应变电阻 SOI技术 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]