三自由度弱耦合谐振式微质量测量传感器  

Three-DoF weakly coupled resonator micro-balance for mass detection

作　　者：肖奇军 罗忠辉 郭大为 XIAO Qi-jun;LUO Zhong-hui;GUO Da-wei(School of Electronic and Electrical Engineering,Zhaoqing University,Zhaoqing 526061,China;School of Mechatronic Engineering,Guangdong Polytechnic Normal University,Guangzhou 510665,China;Beijing Shijitan Hospital,Capital Medical University,Beijing 100038,China)

机构地区：[1]肇庆学院电子与电气工程学院,广东肇庆526061 [2]广东技术师范大学机电工程学院,广东广州510665 [3]首都医科大学附属北京世纪坛医院,北京100038

出　　处：《光学精密工程》2021年第2期297-304,共8页Optics and Precision Engineering

基　　金：广东省自然科学基金资助项目(No.2016A030313846);广东省教育厅特色创新项目(No.2017KTSCX197);肇庆市高校重点学科-电子科学与与技术。

摘　　要：为了实现对微小质量的测量,本文提出了一种基于模态局部化效应三自由度弱耦合谐振式微质量传感器,建立3个谐振器的运动方程式,获得质量扰动的系统方程,建立了三自由度耦合谐振系统的MATLAB/SIMULINK模型,得出幅值比变化相对于振幅变化和谐振频率变化来说具有最高的归一化灵敏度。最后进行传感器设计和微加工,搭建质量测量系统。实验结果表明,电压幅值比的变化产生的归一化灵敏度大约是振幅变化的4倍,大约是频移变化的两个数量级,最小可检测质量值为2 ng。仿真和实验结果表明,三自由度模态局部化弱耦合谐振器能实现对微质量的测量,具有良好的生物传感应用前景。To measure micro-masses effectively,a three degrees-of-freedom(3-DoF)mode localized weakly coupled resonator micro-mass sensor was proposed in this study.The equations of motion of three resonators were established,the system equations of mass disturbance were obtained,and a MATLAB/SIMULINK model of a 3-DoF coupled resonance system was established.The study determined that the variation in amplitude ratio has the highest normalized sensitivity compared with the variation in amplitude and frequency shift.The sensor was designed and fabricated using micro-electromechanical system(MEMS)technologies,and a mass measurement system was also developed.Experimental results reveal that the normalized sensitivity of the change in voltage amplitude ratio is approximately four times the change in amplitude.In addition,approximately two orders of magnitude of resonant frequency shift occurred,and the minimum detectable mass is 2 ng.Simulation and experimental results prove that the 3-DoF mode localized weakly coupled resonator can effectively measure micro-masses and thus has good prospects for bio-sensing applications.

关 键 词：微质量传感器 三自由度 模态局部化 弱耦合 谐振器 

分 类 号：TH703[机械工程—仪器科学与技术] TN703[机械工程—精密仪器及机械]