一种地面用静电悬浮加速度计的误差分析及仿真  

Error analysis and simulation of a ground electrostatic suspended accelerometer

作　　者：贺晓霞[1] 李娇娇 李海霞[1] 韩丰田[1] 刘云峰[1] HE Xiaoxia;LI Jiaojiao;LI Haixia;HAN Fengtian;LIU Yunfeng(Department of Precision Instruments,Tsinghua University,Beijing 100084,China)

机构地区：[1]清华大学精密仪器系导航技术工程中心,北京100084

出　　处：《中国惯性技术学报》2020年第6期794-801,共8页Journal of Chinese Inertial Technology

基　　金：装备预研重点基金(JZX7Y20190257054601)。

摘　　要：针对航空/航海重力及重力梯度测量、惯性导航等领域对高精度加速度计的迫切需求,提出了一种适合地面应用环境的高精度三轴静电加速度计方案。该加速度计敏感质量采用一种中心固定有一薄法兰盘的空心薄壁圆筒,圆筒内外侧与法兰盘两侧布置检测和加力电极。对影响静电加速度计性能的误差源及其作用机理进行了研究。基于MATLAB/Simulink,建立了一套三轴静电悬浮加速度计控制系统仿真模型,设计了加速度计的控制参数,并比较分别采用盘面电极与柱面电极作为敏感质量位移与姿态检测的测量电极时,典型误差源对加速度计标度因数的影响程度。仿真结果表明,采用柱面电极用于测量时标度因数稳定性可达10-9 V/g量级,比采用盘面电极提高了一个数量级。因此在工程中选择柱面电极作为敏感质量位移与姿态检测的测量电极。In view of the urgent demand for high-precision accelerometer in the fields of aviation/navigation gravity and gravity gradient measurement,inertial navigation and other fields,a high-precision three-dimensional electrostatic suspended accelerometer(ESA)scheme suitable for ground application environment is proposed.The test mass adopts a hollow thin-walled cylinder with a thin flange fixed in the center,and the detection and force-added electrodes are arranged on the inner and outer sides of the cylinder and both sides of the flange plate.The error sources that affect the performance of the ESA and their mechanism are studied.Based on the MATLAB/Simulink,a three-dimensional model of the ESA system is established,and the control parameters of the accelerometer are designed.The influence of typical error sources on the scale factor are compared when the disk electrode and cylindrical electrode are used as the measuring electrode of the displacement and attitude detection.The simulation results show that the stability of scale factor can reach 10-9 V/g by using cylindrical electrode,which is one order of magnitude higher than that of the disk electrode.Therefore,cylindrical electrode is selected as the measurement electrode for the test mass displacement and attitude detection in engineering.

关 键 词：静电悬浮加速度计 误差源 PID控制 仿真 

分 类 号：U666.1[交通运输工程—船舶及航道工程]