磁控溅射镀CrAlSiN涂层的抗高温水蒸气氧化性能  

High Temperature Steam Oxidation Resistance of Magnetron Sputtered CrAlSiN Coatings

作　　者：刘海勇 祝涵 董悦 葛芳芳 黄峰 舒杰[1] LIU Hai-yong;ZHU Han;DONG Yue;GE Fang-fang;HUANG Feng;SHU Jie(Materials Science and Chemical Engineering,Ningbo University,Ningbo 315211,China;Engineering Laboratory of Advanced Energy Materials,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China)

机构地区：[1]宁波大学材料科学与化学工程学院,浙江宁波315211 [2]中国科学院宁波材料技术与工程研究所中国科学院先进能源材料工程实验室,浙江宁波315201

出　　处：《表面技术》2021年第3期308-314,共7页Surface Technology

基　　金：国家重点研发计划(2016YFC1400605);国家自然科学基金(51871231)。

摘　　要：目的提高锆合金包壳管的事故容错能力。方法采用磁控溅射法,在锆基底上沉积CrAlSi和CrAlSiN两种涂层,表征了涂层的结构形貌、机械性能和抗高温水蒸气氧化行为等。结果CrAlSi涂层呈致密的柱状晶结构。CrAlSiN涂层结构致密,晶粒尺寸小,接近非晶质地。CrAlSiN涂层与Zr基底之间的结合力(~46 N)高于CrAlSi涂层与Zr基底之间的结合力(~27 N),2种涂层的硬度大约为Zr基底硬度的3~4倍,表现出良好的机械性能。同时,这2种涂层均较大幅度提高Zr基底的抗高温水蒸气氧化能力。经1000℃水蒸气氧化15 min后,4.3μm厚的CrAlSi涂层使Zr(O)层的厚度减少了~67%,而4.6μm厚的CrAlSiN涂层则抑制了Zr(O)层的形成。14μm厚的CrAlSiN涂层使Zr基底在1200℃高温水蒸气中保持未氧化状态大于60 min。结论磁控溅射制备的CrAlSi涂层和CrAlSiN涂层均能有效地抑制Zr合金的高温水蒸气氧化,且后者的防护效果更佳。To enhance the accident tolerance of zirconium(Zr)alloy claddings,CrAlSi and CrAlSiN coatings were deposited on Zr substrates by magnetron sputtering.The microstructure,mechanical properties,and high temperature steam oxidation resistance of the coatings were characterized.The results showed that the CrAlSi coating exhibited dense columnar crystalline structure,while the CrAlSiN coating exhibited dense structure,with very small grain nearly closer to amorphous.The adhesion between CrAlSiN coating and Zr substrate(~46 N)is higher than that between CrAlSi coating and Zr substrate(~27 N).Both coatings had good mechanical properties and improved high resistance against the high-temperature steam oxidation for the Zr substrate.Their hardness values were about 3 to 4 times that of the Zr substrate.Meanwhile,after the 1000℃steam oxidation test for 15 minutes,the thickness of Zr(O)layer decreased by 67%for it was coated with a 4.3μm thick CrAlSi coating,and no oxidation of the Zr substrate occurred after it was coated by a 4.6μm thick CrAlSiN coating.Furthermore,a 14μm thick CrAlSiN coating could prevent the Zr substrate from oxidation in the 1200℃steam more than 60 min.Both CrAlSi and CrAlSiN coatings prepared by magnetron sputtering can effectively inhibit the high temperature steam oxidation of Zr alloy,and the latter has a better protective effect.

关 键 词：Cr基涂层 事故容错性 抗高温水蒸气氧化 硬度 Zr包壳 磁控溅射 

分 类 号：TG172[金属学及工艺—金属表面处理]