小型离子源中膜孔静电透镜系统仿真研究  

Optimization of Membrane Hole Lens Set in Miniaturized Ion Source:An Instrumentation Study

作　　者：张棋 王国栋[1] 王进伟 林云龙 伊明辉 李涛[2] 唐振宇[2] ZHANG Qi;WANG Guodong;WANG Jinwei;LIN Yunlong;YI Minghui;LI Tao;TANG Zhenyu(Department of Vacuum Science and Equipment Engineering,Hefei University of Technology,Hefei 230009,China;Key Laboratory of Reliability and Environmental Engineering Technology,Beijing Satellite Environmental Engineering Research Institute,Beijing 100094,China)

机构地区：[1]合肥工业大学真空科学与装备工程系,合肥230009 [2]北京卫星环境工程研究所可靠性与环境工程技术重点实验室,北京100094

出　　处：《真空科学与技术学报》2021年第1期35-39,共5页Chinese Journal of Vacuum Science and Technology

基　　金：中央高校基本科研业务费专项资金(2013HGQC0031);安徽省高等学校省级质量工程资助项目(4116000024)。

摘　　要：离子源是各种类型质谱仪、离子加速器、离子注入机、离子束刻蚀机等电真空设备不可缺少的部件,静电透镜系统是离子源的重要组成部分。本文基于圆孔膜片透镜理论及带电粒子在静电场中的运动理论,利用多重物理场软件COMSOL对一种小型化离子源的离子加速系统进行了仿真研究。分析了离子加速区透镜片数为4片、23片时不同位置的圆孔膜片透镜电压对离子束能量及发散角的影响。计算结果表明,离子加速区膜孔透镜数量为4片时,更易于通过透镜电压调节离子束光斑尺寸,当膜孔透镜相对位置为12 mm、透镜电压为510 V时,离子束发散角最小值为3°,离子能量最高值为480 eV。The field distribution and ion trajectory,in the ion acceleration region comprising 4 pieces or 23 pieces of membrane hole electrostatic lens,were mathematically modeled,theoretically analyzed and numerically simulated with COMSOL software for design optimization of the miniaturized ion source.The influence of the key variables,including the number,position,spacing and voltage of the membrane hole-lens,on the energy and divergence of the ion-beam was investigated.The simulated results show that when it comes to precise ion-beam confinement,the 4 focusing lenses-set outperforms the 23 lenses-set. To be specific,when the 1st lens is installed 12 mm from the 2nd one(the spacing of the rest lens is 1 mm) and at an optimized lens voltage of 510 V,the ion-beam has the smallest divergence angle of 3° and the highest energy of 480 eV.

关 键 词：离子源 膜孔静电透镜 发散角 离子能量 

分 类 号：TN103[电子电信—物理电子学] O463.2[机械工程—光学工程]