深能级瞬态谱仪样品台系统的改进  

Improvement of the sample stage system of deep level transient spectrometer

作　　者：李芸 马瑶[1,2] 杨治美[1] 赖力 黄铭敏 LI Yun;MA Yao;YANG Zhimei;LAI Li;HUANG Mingmin(College of Physical Science and Technology,Sichuan University,Chengdu 610064,China;Key Lab of Microelectronics Technology of Sichuan Province,Sichuan University,Chengdu 610064,China)

机构地区：[1]四川大学物理学院,四川成都610064 [2]四川大学微电子技术四川省重点实验室,四川成都610064

出　　处：《实验室科学》2021年第1期201-204,209,共5页Laboratory Science

基　　金：四川大学2017年实验技术立项基金(项目编号:20170023)。

摘　　要：深能级瞬态谱仪能检测半导体中微量杂质、缺陷的深能级及界面态,经过全面的数据分析,可以确定杂质和缺陷的类型、含量、陷阱密度、随深度的分布、陷阱上载流子的激活能以及陷阱中心对自由载流子的俘获截面信息等。在使用过程中存在温度控制不理想、样品架不稳定两大问题。通过对深能级瞬态谱仪样品台系统的相关部分进行改进和改造,解决了上述问题,提高了实验的准确度,提高了实验效率,拓宽了测试样品的种类。The deep level transient spectrometer(DLTS)can detect trace impurities,the deep levels of and defects and interface states in semiconductors.After comprehensive data analysis,the types and contents of impurities and defects,trap density,distribution with depth,the activation energy of carries in traps,the capture cross-section information of the free carrier at the trap center,etc.There were two major problems in use process:uneven temperature control and unstable sample holder.Through the improvement and reformation of the relevant parts of the sample stage system of the DLTS,the problems above were solved,the accuracy of the experiment was improved,the experimental efficiency was improved and the type of test samples were broadened.

关 键 词：深能级瞬态谱仪 样品台系统 实验仪器 

分 类 号：O474[理学—半导体物理]