半导体器件早期失效筛选方法  

The Screening Method for Early Failure of Semiconductor Devices

作　　者：张莉萍 ZHANG Li-ping(Huada Semiconductor Co.,Ltd.,Shanghai 201203,China)

机构地区：[1]华大半导体,上海201203

出　　处：《中小企业管理与科技》2021年第9期137-138,141,共3页Management & Technology of SME

摘　　要：为了获得更高的产品质量和可靠性,降低产品早期失效率,老化筛选一直是半导体生产测试的常规流程。但是器件老化非常耗时,而且会带来高昂的成本。论文讨论在何种条件下可以减少和取消器件老化,并提出了既能保证可靠性又能经济地筛选早期失效的有效方法——高电压应力和IDDQ测试方法。In order to obtain higher product quality and reliability,reduce the early failure rate of products,aging screening has always been the routine process of semiconductor production testing.However,device aging is time consuming,and it will bring high costs.The paper discusses the conditions under which device aging can be reduced and eliminated,and proposes effective methods that can ensure reliability and economically screen early failure,namely high voltage stress and IDDQ testing methods.

关 键 词：早期失效 老化 高电压应力 IDDQ测试 

分 类 号：TN303[电子电信—物理电子学]