共用桥腿式高性能非制冷红外焦平面探测器研究  

Research of high-performance uncooled infrared focal plane array detector with common-leg structure

作　　者：王雅琴 蔡光艳 马占锋 高健飞 黄立 Wang Yaqin;Cai Guangyan;Ma Zhanfeng;Gao Jianfei;Huang Li(Wuhan Guide Infrared Co.,Ltd.,Wuhan 430205,China)

机构地区：[1]武汉高德红外股份有限公司,湖北武汉430205

出　　处：《红外与激光工程》2021年第3期86-92,共7页Infrared and Laser Engineering

摘　　要：研制出一种新型微桥结构的氧化钒非制冷红外焦平面探测器。该微桥结构采用列相邻像素共用桥腿的方式,极大地增加了桥腿长度,减小热导,能有效提高像元响应率并降低噪声等效温差(NETD)。同时该微桥结构采用双层工艺,增加桥面及氧化钒面积,提升填充率,进一步提升探测器性能。探测器器件阵列采用384×288,像素为12μm,读出电路采用逐行积分、逐列输出模式,封装方式采用高可靠性的金属真空封装。测试结果表明,探测器的NETD不大于15 mK,响应率大于44 mV/K。其性能指标可以满足民用、军用等领域的应用需求。A novel micro bridge structure for uncooled vanadium oxide infrared focal plane array(IRFPA)detector was developed.This micro bridge used common-leg structure,which was shared by column adjacent pixels.Common-leg structure greatly increased the leg length,reducing the thermal conductivity,which could effectively improve the response rate and reduced the negative electron-transfer dissociation(NETD).Furthermore,the micro bridge adopted double-layer process to increase the area of the deck and the vanadium oxide,which could improve the filling rate and the detector performance.The detector array was 384×288 with12μm pixels.The readout integrated circuit(ROIC)adopted rolling-shutter mode for integration and a pixel-bypixel mode for readout.The high reliability metal vacuum package was used for the device.The results showed that the NETD of the detector was less than 15 mK,and the response rate was greater than 44 mV/K.Its performance index could meet the requirements of civil and military applications.

关 键 词：共用桥腿 微桥结构 非制冷红外 红外焦平面探测器 

分 类 号：TN215[电子电信—物理电子学]