一种新型表面轮廓仪的设计  

Design of New Surface Profilometer

作　　者：赵路路 王庭有[1] 周松斌 ZHAO Lu-lu;WANG Ting-you;ZHOU Song-bin(Faculty of Mechanical and Electrical Engineering,Kunming University ofScience and Technology;Guangdong Institute of Intelligent Manufacturing)

机构地区：[1]昆明理工大学机电工程学院 [2]广东省智能制造研究所

出　　处：《化工自动化及仪表》2021年第2期156-161,共6页Control and Instruments in Chemical Industry

基　　金：国家自然科学基金青年科学基金项目(6180022835);广东省自然科学基金项目(2020A1515010768);广州市产业技术重大攻关计划(201902010040)。

摘　　要：针对传统表面轮廓测量方法存在的速度慢、测量不准确、对透明物体难以测量及测量信号误差较大且不易处理等问题,设计了一种新型表面轮廓仪。通过温度补偿方法,对电涡流位移传感器进行了温度补偿。基于LabVIEW,设计了人机交互界面。试验表明该轮廓仪具有一定的可行性。Aiming at traditional surface profile detection methods’slow speed,inaccurate measurement,difficulty in detecting transparent objects,large errors and difficulty in processing signals,a new surface profilometer was designed.Through temperature compensation,the eddy current sensor was compensated and based on LabVIEW,the human-computer interaction interface was designed.The test results proved the feasibility of this new surface profilometer.

关 键 词：表面轮廓仪 电涡流位移传感器 温度补偿 LABVIEW 

分 类 号：TH821[机械工程—仪器科学与技术]