低噪声原子力显微镜测量单元设计  

Design of measurement unit for low noise atomic force microscope

作　　者：许军 金晨 牛刘敏 董诚 王慧云 王旭东 董震 孔融智 秦丽[1,2] 温焕飞 马宗敏 XU Jun;JIN Chen;NIU Liu-min;DONG Cheng;WANG Hui-yun;WANG Xu-dong;DONG Zhen;KONG Rong-zhi;QIN Li;WEN Huan-fei;MA Zong-min(Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Taiyuan Shanxi 030051;School of Instrument and Electronics,North University of China,Taiyuan Shanxi 030051,China)

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051 [2]中北大学仪器与电子学院,山西太原030051

出　　处：《电子显微学报》2021年第2期138-143,共6页Journal of Chinese Electron Microscopy Society

基　　金：科技部国家重点研发计划项目(No.2018YFF01012502);国家自然科学基金资助项目(No.61874100);山西省重点研发计划项目(No.201803D421037);山西“1331工程”重点学科建设(No.1331KSC)。

摘　　要：为进一步提高大气下非接触式原子力显微镜(NC-AFM)表征样品形貌的分辨率及纵向检测灵敏度,本文提出了一种基于光偏转检测方法的新型非接触式噪声溯源抑制模型及多级隔振的机械振动噪声主动隔振装置。通过多源噪声抑制系统的设计,实现了实验环境下传递到实验装置的高低频振动由69 nm有效的衰减至0.03 nm以下。结合光偏转理论,系统在大气下的探针检测灵敏度为156.4 mV·nm^(-1)、电压偏转噪声密度为2.24μV/√Hz、偏转噪声密度达到了17.72 fm/√Hz。系统噪声得到有效的抑制,为进一步实验奠定了基础。In order to further improve the resolution and longitudinal detection sensitivity of non-contact atomic force microscopy(NC-AFM)in atmospheric environment,a new non-contact noise traceability suppression model based on optical deflection detection method and a multi-stage vibration isolation device for mechanical vibration and noise were proposed.Through the design of multi-source noise suppression system,the high-frequency and low-frequency vibration transmitted to the experimental device in the experimental environment is effectively attenuated from 69 nm to less than 0.03 nm.Combined with the optical deflection theory,the detection sensitivity of the probe is 156.4 mV·nm^(-1),the voltage deflection noise density is 2.24μV/√Hz and the deflection noise density is 17.72 fm/√Hz in the atmosphere.The system noise is effectively suppressed,which lays a foundation for further experiments.

关 键 词：非接触式原子力显微镜(NC-AFM) 光偏转检测 噪声溯源抑制 主动隔振 低噪声 

分 类 号：TH741[机械工程—光学工程]