软磁样品对半浸没式物镜的影响及故障排除  

Effect of soft magnetic sample on semi-immersion objective lens and malfunction resolution

作　　者：黄梦诗 孙千[2] 马清 高尚 HUANG Meng-shi;SUN Qian;MA Qing;GAO Shang(School of Materials Science and Engineering,Harbin Institute of Technology,Shenzhen Guangdong 518055;School of Materials Science and Engineering,South China University of Technology,Guangzhou Guangdong 510006,China)

机构地区：[1]哈尔滨工业大学(深圳)材料科学与工程学院,广东深圳518055 [2]华南理工大学材料科学与工程学院,广东广州510006

出　　处：《电子显微学报》2021年第2期182-187,共6页Journal of Chinese Electron Microscopy Society

基　　金：哈尔滨工业大学(深圳)创新实验项目(No.INEP1013)。

摘　　要：由于半浸没式物镜极靴下方存在磁场,用扫描电镜表征磁性样品时存在因样品被吸入物镜而严重影响成像的风险。本文中,日立S4700型场发射扫描电镜突然出现图像信噪比急剧下降、像散不能消除的问题,经过分析和排查发现是由软磁性的泡沫镍被吸入物镜极靴导致的故障。本文从物镜结构、合轴、像散三个方面分析了磁性样品对电镜成像的影响,并结合此次故障的分析和排除方法,总结了扫描电镜表征磁性样品的注意事项以及磁性样品吸入的处理方法。比如在磁性样品制备方面,应注意磁性样品的消磁和固定;在参数设置方面,应使用合适的观察模式并适当加大工作距离。Due to the presence of a magnetic field under the pole shoes of the semi-immersion objective lens,there is a risk of seriously affecting imaging when the scanning electron microscope is used to characterize a magnetic sample because the sample is drawn into the objective lens.In this article,Hitachi S4700 field emission scanning electron microscope suddenly showed the problem that the image signal-to-noise ratio dropped sharply and the astigmatism could not be eliminated.After analysis and investigation,it was found that the soft magnetic nickel foam was sucked into the pole piece of the objective lens and caused the failure.This article analyzes the influence of magnetic samples on electron microscope imaging from three aspects of objective lens structure,joint axis,and astigmatism.Combined with the analysis and malfunction resolution methods of this failure,the precautions for the characterization of magnetic samples by scanning electron microscope and the inhalation of magnetic samples are summarized.For example,in the preparation of magnetic samples,attention should be paid to the demagnetization and fixation of magnetic samples;in the setting of parameters,an appropriate observation mode should be used and the working distance should be appropriately increased.

关 键 词：扫描电镜 磁性样品 物镜 故障排除 

分 类 号：TG115.215.3[金属学及工艺—物理冶金] TM271.2[金属学及工艺—金属学]