扫描电镜中的算法进展  

Progress of algorithms in scanning electron microscope

作　　者：高尚 黄梦诗 周彬 马清 GAO Shang;HUANG Meng-shi;ZHOU Bin;MA Qing(School of Materials Science and Technology,Harbin Institute of Technology,Shenzhen Guangdong 518055,China)

机构地区：[1]哈尔滨工业大学(深圳)材料科学与工程学院,广东深圳518055

出　　处：《电子显微学报》2021年第2期203-213,共11页Journal of Chinese Electron Microscopy Society

基　　金：教育部产学合作协同育人项目(No.201802284007);深圳市教育科学规划项目(No.ybfz18034);哈尔宾工业大学(深圳)创新实验项目(No.INEP1013)。

摘　　要：在过去的二十年中,同透射电镜一样,在扫描电镜上也取得了许多硬件的进展,如浸没式物镜、减速模式和新型探测器技术。测试技术的进步包括硬件和软件两方面内涵。伴随硬件的进步,借助信息科学(包括人工智能(AI)和其他统计数学方法),人们在成像和光谱学方面也有了新的机遇。硬件与软件结合,可以实现更高精度、更高通量的表征,也使得如今的扫描电镜越发智能与易用。本文简要介绍在扫描成像、EDS和EBSD算法上的诸多进展,诸如多元分析、压缩感知和词典算法等。Over the past two decades,as with transmission electron microscopy,many hardware advancements have also been made in scanning electron microscopy,such as the widespread use of immersion objectives,deceleration modes,and new detector technology.The progress of testing technology includes both hardware and software.With the advancement of hardware,with the help of information science(including artificial intelligence(AI)and other statistical mathematical methods),people also encountered opportunities in imaging and spectroscopy.The combination of hardware and software can also achieve higher-accuracy and higher-throughput characterization,which makes state-of-the-art scanning electron microscopes more intelligent and easy to use.This article briefly introduces many advances in EM imaging,EDS and EBSD algorithms,such as multivariate analysis,compressed sensing and dictionary algorithms.

关 键 词：扫描电镜 EBSD EDS 压缩感知 主成分分析 多元成分分析 词典算法 

分 类 号：TG115.215.3[金属学及工艺—物理冶金] TP181[金属学及工艺—金属学]