压电弯曲效应弹性环晶片夹持结构设计  

DESIGN OF ELASTIC RING CLAMPING STRUCTURE FOR PIEZOELECTRIC BENDING EFFECT

作　　者：高长银 吴晓铃[2] GAO ChangYin;WU XiaoLing(School of Aeronautical Engineering,Zhengzhou University of Aeronautics,Zhengzhou 450015,China;School of Mechanical Engineering,Zhengzhou University,Zhengzhou 450001,China)

机构地区：[1]郑州航空工业管理学院航空工程学院,郑州450015 [2]郑州大学机械工程学院,郑州450001

出　　处：《机械强度》2021年第2期494-498,共5页Journal of Mechanical Strength

基　　金：河南省自然科学基金项目(162300410313)资助。

摘　　要：为验证石英晶片弯曲效应,设计了弹性环晶片夹持结构。根据弹性力学和压电学推导石英晶片弯曲应力和极化强度计算公式,接着对设计的弹性环晶片夹持结构进行受力分析,为了减少结构变形对传感器使用影响,根据弹性力学能量原理推导出在载荷作用下该弹性环结构静刚度计算公式,并采用有限元方法进行强度和刚度校核。理论计算、有限元分析和实测均表明,该弹性环晶片夹持结构刚度> 10 kgf/um,满足传感器设计要求。该弹性环晶片夹持结构必将促进新型悬臂梁测力传感器和微执行器的研发。In order to verify the bending effect of quartz wafer,a special elastic ring clamping structure was designed to install and position the sensitive element. According to elastic mechanics and piezoelectricity,the calculation formula of bending stress and polarization of quartz wafer were deduced and the stress analysis of the elastic ring wafer clamping structure was carried out. In order to reduce the influence of structural deformation on sensor application performance,using the energy principle of elastic mechanics the static stiffness formula of the elastic ring wafer clamping structure under load was calculated. Using the finite element method the strength and stiffness of the elastic ring wafer clamping structure was verified. The theoretical calculation,finite element analysis and experimental measurement results show that the rigidity of the elastic ring wafer clamping structure is more than 10 kgf/um,which meets the requirements of sensor design. The research can provide technical support for the structural design of the new cantilever force sensor and micro actuator.

关 键 词：弹性环夹持 刚度 有限元 强度 变形 

分 类 号：TH122[机械工程—机械设计及理论] TH114