跨尺度精密运动压电平台和快速驱动方法研究  

Research on Trans-Scale Precision Motion Piezoelectric Platform and Fast-Driving Method

作　　者：黄开明 孙承峰[1] 衡扬 孙立宁[1] 钟博文[1] HUANG Kaiming;SUN Chengfeng;HENG Yang;SUN Lining;ZHONG Bowen(College of Mechanical and Electrical Engineering,Soochow University, Suzhou 215000,China)

机构地区：[1]苏州大学机电工程学院,江苏苏州215000

出　　处：《压电与声光》2021年第2期187-191,共5页Piezoelectrics & Acoustooptics

基　　金：国家重点研究发展基金资助项目(2018YFB1304900);国家自然科学基金资助项目(51875378);江苏省自然科学基金资助项目(BK20181439)。

摘　　要：该文提出了一种基于惯性粘滑驱动原理、可快速运动的跨尺度精密运动压电平台。该平台由滑动部分、摩擦调整部分、堆叠压电陶瓷、惯性部分和底座组成,总尺寸为60 mm×60 mm×58 mm。该文详细介绍了基于此结构的新型惯性粘滑驱动原理。为了研究所设计压电平台的驱动性能,制作了样机并建立了实验系统。实验中,驱动频率7 kHz时最大的单步步距为2.67μm,最大速度为22.7 mm/s,最大静态保持力为36 N。实验结果表明,该文设计的平台可快速运动,具有良好的运动性能。This paper proposed a trans-scale fast-moving piezoelectric platform based on the principle of inertial stick-slip driving.The platform consisted of a sliding part,a frictional adjustment part,a stacked piezoelectric ceramic,an inertial part and a base,and the total size was 60 mm×60 mm×58 mm.The novel inertial stick-slip driving principle based on the proposed structure was introduced in detail.To investigate the driving performance,a prototype was fabricated and an experimental system was set up.In experiment,the maximum single step distance driving frequency is 2.67μm,the maximum velocity is 22.7 mm/s,and the maximum static retention is 36 N at 7 kHz.The experimental results show that the designed piezoelectric platform designed in this paper has achieved the goal of fast motion and has good motion performance.

关 键 词：跨尺度 压电平台 结构设计 粘滑驱动 快速 

分 类 号：TN384[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]