微型化FAIMS气体传感器的制备与测试  

Preparation and Testing of Miniaturized FAIMS Gas Sensor

作　　者：张成印 雷程[1,2] 梁庭[1,2] 刘瑞芳 冯伟[1,2] 单存良[1,2] 薛胜方 Zhang Chengyin;Lei Cheng;Liang Ting;Liu Ruifang;Feng Wei;Shan Cunliang;Xue Shengfang(Key Laboratory of Instrumentation Science&Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China;Shanxi Provincial Key Laboratory of Dynamic Testing Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学动态测试技术山西省重点实验室,太原030051

出　　处：《微纳电子技术》2021年第3期219-224,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61335008);山西省自然科学基金资助项目(201801D221203);高等学校科技创新资助项目(1810600108MZ)。

摘　　要：依据高场非对称波形离子迁移谱(FAIMS)原理,设计了一种迁移区和收集区一体化式的微型化FAIMS气体传感器。电离区采用能量为10.6eV的紫外灯对异丁烯气体进行电离,迁移区和收集区采用微电子机械系统(MEMS)工艺进行制备,将图形化后的硅片和硼硅玻璃通过阳极键合工艺制备成一体化的传感器,传感器尺寸为3mm×4mm×1mm。实验中,搭建了相应的测试系统,在收集区外接放大电路对异丁烯的电离进行了检测。将传感器在不同体积分数异丁烯环境中进行测试。测试结果表明,传感器测试精度可达1×10^(-7)/mV,在体积分数2×10^(-4)的异丁烯环境中其响应时间为6s,恢复时间为7s,具有较快的响应时间和恢复时间,且具有良好的稳定性和重复性。According to the principle of high-field asymmetric waveform ion mobility spectroscopy(FAIMS),a miniaturized FAIMS gas sensor with integrated migration area and collection area was designed.In the ionization region,the isobutene gas was ionized by an UV lamp with an energy of 10.6 eV.The migration area and collection area were prepared by micro-electromechanical system(MEMS)process,and the patterned silicon wafer and borosilicate glass were prepared into an integrated sensor with a size of 3 mm×4 mm×1 mm through an anodic bonding process.In the process of experiment,the corresponding test system was set up,an amplifier circuit was connected outside the collection area to detect the ionization of isobutene.The sensor was tested in isobutene environments with different volume fractions.The test results show that the test precision of the sensor can reach 1×10^(-7)/mV,and in the isobutene environment with a volume fraction of 2×10^(-4),its response time and recovery time are 6 s and 7 s,respectively.The sensor has fast response time and recovery time and good stability and repeatability.

关 键 词：气体传感器 微电子机械系统(MEMS) 高场非对称波形离子迁移谱(FAIMS) 阳极键合 气体检测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]