MEMS微同轴宽带功分器  

MEMS Micro Coaxial Broadband Power Divider

作　　者：李康禾 李宏军[1] 杨强[1] 王建 史光华[1] Li Kanghe;Li Hongjun;Yang Qiang;Wang Jian;Shi Guanghua(The 13^(th)Research Institute,China Electronics Technology Group Corporation,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《微纳电子技术》2021年第3期238-243,共6页Micronanoelectronic Technology

摘　　要：随着微波系统大功率、超宽带的发展,对功率分配/合成结构的性能提出了更高的要求,超宽带、低损耗、小尺寸、易于集成的功分器成为研究热点。基于微电子机械系统(MEMS)工艺的微同轴射频传输线具有超宽带、无色散、低损耗和高隔离度等特点,使用微同轴工艺制备的功分器具有超宽带、低损耗、易于集成、小型化和可移植性好等特点。仿真并制作了一款微同轴一分二功分器。测试结果表明,在6~18GHz内插入损耗小于0.3dB,功分器体积为3mm×5.85mm×0.5mm,功率容量不小于100W。通过包金带的方式装配了功分器的背靠背结构。测试结果表明,背靠背结构损耗与预期损耗相符。为微同轴功分器在100W有源功放组件中的应用奠定了基础。With the development of high power and ultra-wideband of the microwave system,the higher performance of the power distribution/synthesis structure is required.The power divider with the characteristics of ultra-wideband,low loss,small size and easy integration has become the research focus.The micro coaxial RF transmission line based on micro-electromechanical system(MEMS)process has the characteristics of ultra-wideband,non-dispersion,low loss and high isolation.The power divider fabricated by micro coaxial process has the characteristics of ultra-wideband,low loss,easy integration,miniaturization and good portability.A micro coaxial two-way power divider was simulated and fabricated.The measured result shows that the insertion loss is less than 0.3 dB in 6-18 GHz.The volume of the power divider is 3 mm×5.85 mm×0.5 mm,and the power capacity is not less than 100 W.The back-to-back structure of the power divider was assembled by means of gold belt.The test result shows that the loss of the back-to-back structure is consistent with the expectation value.It lays a foundation for the application of the micro coaxial power divider in 100 W active power amplifier module.

关 键 词：微同轴 功分器/合成器 微电子机械系统(MEMS) 超宽带 小型化 

分 类 号：TN73[电子电信—电路与系统]