基于硅基超表面的高效率大角度光束偏转  

Highly Efficient Large-Angle Beam Deflection Based on Silicon-Based Metasurface

作　　者：陈磊 严金华[1] 郭焕祥 张航[1] Chen Lei;Yan Jinhua;Guo Huanxiang;Zhang Hang(College of Science,Zhejiang University of Technology,Hangzhou,Zhejiang 310023,China)

机构地区：[1]浙江工业大学理学院,浙江杭州310023

出　　处：《光学学报》2021年第3期9-15,共7页Acta Optica Sinica

基　　金：国家自然科学基金面上项目(62075197);浙江省自然科学基金(LY21F050005)。

摘　　要：提出一种由石英和硅纳米束构成的周期性超表面结构。利用相位分布呈周期性梯度变化的特点,可实现垂直入射光的特定角度偏转,偏转角度可通过改变硅纳米束宽度和周期进行调节。仿真结果表明,当偏转角度在±45°范围内,偏转效率超过60%,远场发散角为3°左右。所提结构简单,结合可调激光器、波分复用器组成光束扫描装置并通过改变波长可实现光束角度扫描。所提结构可应用于大角度范围的固态光束扫描。A periodic metasurface structure composed of quartz and silicon nano beams was proposed. The periodic gradient change in the phase distribution can be used for obtaining a specific angle deflection of the vertically incident light, and the deflection angle can be adjusted by changing the width and period of the silicon nano beam. Simulation results show that the deflection efficiency exceeds 60%, and the far-field divergence angle reaches about 3° in the deflection angle range of ±45°. The proposed structure is simple and can be combined with a tunable laser and a wavelength division multiplexer to compose a beam steering device and thus the beam angle can be tuned by changing the wavelength, which can be applied to solid-state beam scanning with large angle range.

关 键 词：衍射 光束偏转 超表面 激光雷达 

分 类 号：O436[机械工程—光学工程]