克服FET生物传感器德拜屏蔽效应的研究进展  

Research Progress on Overcoming Debye Screening Effect of BioFETs

作　　者：熊恩毅 魏淑华[1] 张兆浩 魏千惠 张双 方敏 张青竹[2,5] Xiong Enyi;Wei Shuhua;Zhang Zhaohao;Wei Qianhui;Zhang Shuang;Fang Min;Zhang Qingzhu(School of Information Science and Technology,North China University of Technology,Beijing 100144,China;Advanced Integrated Circuits R&D Center,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;State Key Laboratory of Advanced Materials for Smart Sensing,GRINM Group Co.,Ltd.,Beijing 100088,China;GRIMAT Engineering Institute Co.,Ltd.,Beijing 101402,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]北方工业大学信息学院,北京100144 [2]中国科学院微电子研究所先导工艺研发中心,北京100029 [3]有研科技集团有限公司智能传感功能材料国家重点实验室,北京100088 [4]有研工程技术研究院有限公司,北京101402 [5]中国科学院大学,北京100049

出　　处：《半导体技术》2021年第3期169-177,共9页Semiconductor Technology

基　　金：中国科学院青年促进会基金资助项目(Y9YQ01R004);北方工业大学毓优人才项目;有研集团总部科技创新基金资助项目。

摘　　要：目前场效应晶体管生物传感器(BioFET)已成功用于生物医学检测。虽然BioFET在生物检测方面具有快速响应、无标记和高灵敏度检测等优点,但是BioFET用于生理环境检测时,容易受到德拜屏蔽效应的影响,导致灵敏度降低甚至无法检测。阐述了BioFET的工作原理;介绍了BioFET目前面临的挑战之一——德拜屏蔽效应;解释了德拜屏蔽效应的原理;探讨了克服德拜屏蔽效应的典型方法:增加德拜长度、优化目标物、优化器件结构以及降低电双层影响,并对这4个方面的研究进展从增强机理、具体方法及检测效果等方面进行了详细的分析和总结。At present,field effect transistor biosensors(BioFETs)have been successfully used in biomedical detection.BioFETs have the advantages of fast response,label-free and high-sensitivity detection in biological detection,but they are susceptible to the Debye screening effect when they are used for physiological environment detection,resulting in decrease of sensitivity or even undetectability.The principle of BioFETs is described.Debye screening effect,one of the current challenges of BioFETs,is introduced,and the principle of Debye screening effect is explained.The typical methods to overcome Debye screening effect are discussed,including increasing Debye length,optimizing the target,optimizing the structure of the device,and reducing the influence of the electric double-layer.And the research progress in these four aspects is analyzed and summarized in detail from the enhancement mechanism,specific methods and detection effects.

关 键 词：场效应晶体管(FET) 生物传感器 德拜屏蔽效应 电双层 灵敏度 

分 类 号：TN386[电子电信—物理电子学] TP212.47[自动化与计算机技术—检测技术与自动化装置]