具有快速分离效果基于微机电系统的波浪形半填充微型气相色谱柱的研究  

Fast Separation on Microelectromechanical System-based Semi-packed Gas Chromatography Wavy Column

作　　者：袁欢[1,2] 杜晓松 徐明[1] 张传武[1] 陈向东[3] YUAN Huan;DU Xiao-Song;XU Ming;ZHANG Chuan-Wu;CHEN Xiang-Dong(Key Laboratory of Electronic and Information Engineering,State Ethnic Affairs Commission,Southwest Minzu University,Chengdu 610041,China;State Key Laboratory of Electronic Thin Film and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China;School of Information Science and Technology,Southwest Jiaotong University,Chengdu 611756,China)

机构地区：[1]西南民族大学,电子信息工程国家民委重点实验室,成都610041 [2]电子科技大学,电子薄膜与集成器件国家重点实验室,成都610054 [3]西南交通大学,信息科学与技术学院,成都611756

出　　处：《分析化学》2021年第5期686-692,共7页Chinese Journal of Analytical Chemistry

基　　金：西南民族大学中央高校基本科研业务费(No.2020PTJS19002);四川省科学技术厅科研项目(No.2018JY0338);国家自然科学基金项目(No.61901401)资助。

摘　　要：区别于传统的矩形槽道微型气相色谱柱,本研究利用微机电系统(MEMS)刻蚀技术在硅表面制备了一种波浪形槽道的半填充微型气相色谱柱,柱长2 m,刻蚀深度300μm,宽80μm。通过有限元分析软件模拟仿真,考察了镶嵌在波浪形色谱槽道内的半填充柱尺寸、形状和空间分布的流场分布,进而得到最优化的微型气相色谱柱制备参数。仿真研究表明,波浪形槽道内的半填充柱可以有效增加固定相面积;同时,在气-固两相间分配的组分的有效距离变短而改变层流效应。基于优化的参数制备出的波浪形半填充微型气相色谱柱用于分离苯和甲苯,二者在1.5 min内可实现快速分离。考察了8种烷烃类混合物的分离效果,结果表明,波浪形半填充微型气相色谱成功分离8种组分,塔板数达到4790 plates/m。A 200-cm-long,300μm-depth and 80μm-wide gas chromatographic(GC)column was fabricated on the silicon chip by microelectromechanical system(MEMS)technique in this work.Unlike the traditional open gas chromatographic column,the design and fabrication of the MEMS-based GC column folded in a wavy configuration which was filled with a circular micro column with a diameter of 30μm.The size,shape and distribution of the semi-packed column in the prepared micro-chromatographic column were analyzed by finite element analysis software to obtain the optimized preparation parameters.The simulation revealed that MEMS-based semi-packed gas chromatography wavy column achieved an even flow velocity,resulting in a successive improvement of the flow uniformity at the zones between two adjacent bends,as well as a more nonsymmetric distribution at the bends.Benzene and toluene were separated by the fabricated GC column within 1.5 min.In addition,the N-alkane component were separated and the plate number reached 4790 plates/m.

关 键 词：微机电系统 微型气相色谱柱 分离效率 填充柱 

分 类 号：O657.71[理学—分析化学]