微机电系统加速度计辐射效应  

MEMS accelerator and its radiation effects

作　　者：刘珉强 杜川华[1] 许蔚[1] 朱小锋[1] 许献国[1] LIU Minqiang;DU Chuanhua;XU Wei;ZHU Xiaofeng;XU Xianguo(Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang Sichuan 621999,China)

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621999

出　　处：《太赫兹科学与电子信息学报》2021年第1期162-165,169,共5页Journal of Terahertz Science and Electronic Information Technology

基　　金：国家级预先研究基金资助项目(6140A24020105,6140A24030311)。

摘　　要：综述了微机电系统(MEMS)加速度计辐照效应与辐照机理国内外现状,阐释了其加固技术研究的必要性。介绍了不同类型MEMS加速度计的辐射敏感性及材料的辐射退化机理、不同材料的辐射损伤表现及硅材料的辐射效应;重点分析了MEMS加速度计国内外辐照试验研究,最后给出了MEMS加速度计辐射加固研究方向的建议。Radiation effects and radiation mechanism of Micro Electromechanical Systems(MEMS)accelerator are summarized,which indicates the importance of MEMS radiation effect and hardening techniques study.The radiation sensitivities of different types of MEMS accelerator are introduced,as well as the degradation mechanism of radiation effects,radiation damage of different materials and Si radiation effect.The international radiation experiments about MEMS accelerator are emphatically analyzed,and the trends of radiation hardness of MEMS accelerator are put forward.

关 键 词：微机电系统加速度计 辐射效应 辐射加固 

分 类 号：TN307[电子电信—物理电子学]