非晶合金微力传感器  

Bulk metallic glass micro-force sensor

作　　者：张凯翔 马明哲 刘泽 ZHANG Kaixiang;MA Mingzhe;LIU Ze(Department of Engineering Mechanics,School of Civil Engineering,Wuhan University,Wuhan 430072,China;Department of Civil Engineering,School of Civil Engineering,Wuhan University,Wuhan 430072,China)

机构地区：[1]武汉大学土木建筑工程学院工程力学系,湖北武汉430072 [2]武汉大学土木建筑工程学院土木工程系,湖北武汉430072

出　　处：《传感器与微系统》2021年第5期67-70,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(11872284);武汉市科学技术局资助项目(2019010701011390)。

摘　　要：非晶合金具有高强度、高弹性极限等优异的力学性质以及独特的可热塑性成形特性。基于设计的双悬臂探针,制备了一种非晶合金微力传感器。利用所制备的微力传感器,在显微镜下可方便地实现微纳米尺寸试样或部件侧弯作用下的载荷-位移曲线的快速获取。该微力传感器测试原理简单,不需要额外的测试电路设计,具有线性度好、可重复性高、量程大等特点。Bulk metallic glasses possess excellent mechanical properties such as high strength,high elastic limit and unique thermoplastic forming properties.Based on the designed double-cantilever probes,a micro-force sensor can be fabricated from bulk metallic glasses.By using the prepared micro-force sensor under microscopy,in situ bending testing of microsized specimen can be quickly obtained.The test principle of the micro-force sensor is very simple,and it doesn't need additional testing circuit.Besides,the micro-force sensor has the characteristics of good linearity,high repeatability,large measurement range,and so on.

关 键 词：微力传感器 非晶合金 微纳机电系统 微成型 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]