45°光纤微反射镜聚焦离子束加工及多轴位移检测研究  

Research on focused ion beam processing of 45˚optical communication fiber mirror and multi-axis displacement detection

作　　者：李俊 李嘉伟 张鼎博 刘旭[2] 李阔 马天 王伟峰 翟小伟 LI Jun;LI Jiawei;ZHANG Dingbo;LIU Xu;LI Kuo;MA Tian;WANG Weifeng;ZHAI Xiaowei(College of Safety Science and Engineering,Xi’an University of Science and Technology,Xi’an 710054,China;University of Science and Technology of China,Hefei 230026,China;School of Electronic and Electrical Engineering,Bengbu University,Bengbu 233030,China)

机构地区：[1]西安科技大学安全科学与工程学院,陕西西安710054 [2]中国科学技术大学,安徽合肥230026 [3]蚌埠学院电子与电气工程学院,安徽蚌埠233030

出　　处：《应用光学》2021年第3期557-564,共8页Journal of Applied Optics

基　　金：国家自然科学基金(51974236)。

摘　　要：聚焦离子束加工作为一种微纳加工手段,可以用来制造纳米元件和微结构元件。研究了在多芯光纤的末端,使用聚焦离子束加工技术设计和制造45°镜面的全过程。该光学镜面由两步加工完成,首先是扫描过程,用来制造粗糙的切割面;然后是抛光过程,用来完成光学表面的光洁处理。加工完成的45°镜面可以准确地与光纤的纤芯对接,避免了外部转向镜组件对接的相关问题。实验测试表明,加工的结构可以通过干涉测量两个垂直轴向的位移值,检测位移测量范围大致为60μm,X和Y方向的均方根绝对测量误差约为1.75‰和1.97‰。该技术有望用于精密零件内表面、血管内壁等检测领域。As a micro-nano machining method,the focused ion beam(FIB)processing can be used to manufacture the nanometer elements and microstructure elements.The whole process of designing and manufacturing the 45°mirror surface at the end of multi-core fiber using focused ion beam processing technology was studied.This mirror surface was manufactured in two steps:the first was the scanning process,which was used to manufacture the rough cut surface;the second was the polishing process,which was used for the surface finish of optical surface.The machined 45˚mirror surface could be accurately aligned with the fibre core of optical fiber,which avoided related issues of external turning mirror components docking.The experimental test show that the displacement value in two vertical axial directions can be measured by the machined structure with interferometry.The measuring range of the detection displacement is approximately 60μm,and the absolute measurement error of root-mean-square in X and Y axial directions is 1.75‰and 1.97‰,respectively.This technology is expected to be used in the detection fields of inner surface and vessels inter wall for precision components.

关 键 词：物理光学 微加工 聚焦离子束 位移检测 

分 类 号：TN205[电子电信—物理电子学] O436[机械工程—光学工程]