低功耗甲烷传感器研究进展  

Research progress of low-power methane sensor

作　　者：王海波 WANG Haibo(Tiandi (Changzhou) Automation Co., Ltd., Changzhou 213015, China;CCTEG Changzhou Research Institute, Changzhou 213015, China)

机构地区：[1]天地(常州)自动化股份有限公司,江苏常州213015 [2]中煤科工集团常州研究院有限公司,江苏常州213015

出　　处：《工矿自动化》2021年第5期16-23,共8页Journal Of Mine Automation

基　　金：天地科技股份有限公司科技创新创业资金专项项目(2019-TD-ZD007)。

摘　　要：针对分布式无线甲烷传感器需功耗低、微型化、响应时间短、可靠性高、安全性好的要求,介绍了基于微机械电子系统技术和纳米材料的低功耗催化燃烧式、热导式、电导式甲烷传感器的工作原理和研究进展,分析了它们的优缺点,展望了低功耗甲烷传感器的发展方向和前景。①低功耗催化燃烧式甲烷传感器可测量低浓度甲烷,然而易中毒,稳定性不高,由于工作温度较高,低功耗催化燃烧式甲烷传感器的功耗一般较高,通过采用脉冲方式运行,传感器平均功耗可降低至2 mW以下;然而其稳定性不高,未来的研究方向是改进封装工艺或者催化材料,以增强其抗毒化的能力,同时需结合人工智能和机器学习等先进算法研究免人工校准的低功耗催化燃烧式甲烷传感器。②低功耗热导式甲烷传感器具有全量程测量甲烷的能力,可同时测量低浓度和高浓度甲烷,在矿井中可以稳定运行,且对煤矿井下环境的适应力强,具有分布式无线甲烷传感器应用前景;未来的发展方向是改进电路模组,实现睡眠-唤醒运行模式,同时研究传感器元件和外围电路的集成技术,以实现片上集成式热导式甲烷传感系统,降低整体运行功耗。③低功耗电导式甲烷传感器分为室温型和微加热板型,室温型电导式甲烷传感器功耗较低,但响应时间较长;微加热板型电导式甲烷传感器功耗相对低,结合特定的纳米材料,可以在较低工作温度下实现对甲烷的响应,具有低浓度甲烷监测应用前景,但微加热板电导式甲烷传感器一般对环境湿度很敏感,基线易偏移,敏感材料对电极的粘附力差,器件重复性和可靠性均较差,需要进一步改进敏感材料和封装工艺;应用磁控溅射方法将半导体氧化物敏感材料沉积到电极上可提高材料的粘附力,从而提高器件的重复性和可靠性,同时需结合算法纠正基线偏移,保证微加热板型电导�In order to meet the requirements of low power consumption,miniaturization,short response time,high reliability and good safety of distributed wireless methane sensors,the working principles and research progress of low-power catalytic combustion,thermal conductivity and electrical conductivity methane sensors based on micro-electro-mechanical system technology and nano materials are introduced.This paper analyzes their advantages and disadvantages,and proposes the development direction and prospect of low-power methane sensors.①The low-power catalytic combustion methane sensor can measure low-concentration methane.However,it is easy to be poisoned and the sensor has low stability.Due to the need of being high operated temperature,the low-power catalytic combustion methane sensor generally has high power consumption.The average power consumption of the sensors can be reduced to less than 2 mW under the work mode of pulse operation.However,its stability is not high.The future research directions are to improve packaging or catalytic materials to enhance its anti-poisoning ability,and to study low-power catalytic combustion methane sensors without manual calibration by combining advanced algorithms such as artificial intelligence and machine learning.②The low-power thermal conductivity methane sensor can to measure methane in the full range.It can measure both low-concentration and high-concentration methane at the same time.It can operate stably in mines and has strong adaptability to the underground environment of mines.It has the prospect of application of distributed wireless methane sensors.The future development direction is to improve the circuit module to realize the sleep-wake operation mode,and to study the integration technology of sensor elements and peripheral circuits to realize the on-chip integrated thermal conductivity methane sensing system to reduce the overall operation power consumption.③The low-power conductivity methane sensors are divided into room temperature type and micro-heating pl

关 键 词：甲烷传感器 催化燃烧式甲烷传感器 热导式甲烷传感器 电导式甲烷传感器 低功耗 纳米材料 微机械电子系统 

分 类 号：TD712[矿业工程—矿井通风与安全]