原子层沉积制备二氧化钛薄膜及其光催化性能  

Preparation of Titanium Dioxide Thin Films by Atomic Layer Deposition and Its Photocatalytic Activity

作　　者：侯静 杨培志[1] 郑勤红[1] 李赛[1] 杨德威 Hou Jing;Yang Peizhi;Zheng Qinhong;Li Sai;Yang Dewei(Key Laboratory of Renewable Energy Advanced Materials and Manufacturing Technology,Ministry of Education,Yunnan Normal University,Kunming 650500,China;Panzhihua University,Panzhihua 617000,China)

机构地区：[1]云南师范大学可再生能源材料先进技术与制备教育部重点实验室,云南昆明650500 [2]攀枝花学院,四川攀枝花617000

出　　处：《稀有金属材料与工程》2021年第4期1371-1377,共7页Rare Metal Materials and Engineering

基　　金：国家自然科学基金(U1802257);云南省基础研究重点项目(2017FA024);云南省高校科技创新团队支持计划。

摘　　要：采用原子层沉积方法在K9玻璃上制备出TiO_(2)薄膜,利用XRD、SEM、AFM、分光光度计和紫外-可见光谱仪表征了不同沉积温度下薄膜的物相结构、光学性能和光催化性能。结果表明:25和120℃下制备的TiO_(2)薄膜为无定形态结构,210和300℃下可获得锐钛矿结构;随着沉积温度的升高,薄膜的晶粒尺寸变大,表面粗糙度增加,透射率降低,光催化性能增强;300℃下制备的TiO_(2)薄膜(2mm×2mm)经24h的紫外-可见光照射,对甲基橙溶液的降解率可达98.97%,通过平铺方式增加样品的表面积可显著提高对甲基橙溶液的降解率。TiO_(2) thin films were prepared by atomic layer deposition on K9 glass. The crystal structure, optical properties and photocatalytic properties of the films deposited at different temperatures were characterized by XRD, SEM, AFM, spectrophotometer and ultraviolet-visible spectrometer. The results show that TiO_(2) thin films prepared at 25 and 120 ℃ are amorphous, and anatase structure is obtained at 210 and 300 ℃. As the deposition temperature increases, the grain size and surface roughness of the film increase, the transmittance of the film decreases and the lower the transmittance, the better the photocatalytic performance. The degradation rate of methyl orange solution can reach 98.97% under 24 h visible light irradiation of TiO_(2) film(2 mm×2 mm) prepared at 300 ℃. Increasing the sample surface area in a tiling manner can significantly increase the degradation rate of methyl orange solution.

关 键 词：原子层沉积 二氧化钛 薄膜 光催化 

分 类 号：O484[理学—固体物理] O643.36[理学—物理]