氮化铝微环谐振腔临界耦合条件及制备工艺研究  

Critical Coupling Condition and Preparation Technology of Aluminum Nitride Microring Resonator

作　　者：韩毅帅 孙天玉[2] 贾慧民[1] 唐吉龙[1] 房丹[1] 王登魁 王晓华[1] 张宝顺[2] 魏志鹏[1] HAN Yishuai;SUN Tianyu;JIA Huimin;TANG Jilong;FANG Dan;WANG Dengkui;WANG Xiaohua;ZHANG Baoshun;WEI Zhipeng(State Key Laboratory of High Power Semiconductor Laser,College of Science,Changchun University of Science and Technology,Changchun 130022,China;Suzhou Institute of Nano-tech and Nano-bionics,Chinese Academy of Sciences,Suzhou,Jiangsu 215123,China)

机构地区：[1]长春理工大学理学院高功率半导体激光国家重点实验室,长春130022 [2]中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州215123

出　　处：《光子学报》2021年第5期86-94,共9页Acta Photonica Sinica

基　　金：国家自然科学基金面上项目(No.61674021)。

摘　　要：针对氮化铝微环谐振腔实现临界耦合条件困难的问题,设计并制备了氮化铝弯曲耦合微环谐振腔。分析了微环谐振腔耦合系数公式,分别阐述了多种提高耦合强度方案的优势和劣势,最终选用弯曲耦合结构来增强耦合强度,得到了在宽耦合间隙下,实现临界耦合条件的解决方案。在蓝宝石衬底上生长了高质量的氮化铝单晶薄膜,选用导电胶克服材料的不导电性,并利用电子束曝光系统将弯曲角度为40°、耦合间隙0.19μm、波导宽度0.41μm的微环谐振腔图形化,分析优化多项氮化铝刻蚀参数,最终将图形转移至氮化铝层,得到了耦合间隙均匀、侧壁平整的弯曲耦合氮化铝微环谐振腔。该研究为氮化铝微环谐振腔实现临界耦合条件提供了选择参考。Aiming at the difficulty of achieving critical coupling conditions for aluminum nitride microring resonators,an aluminum nitride bending-coupled microring resonator is designed and prepared.Through the analysis of the coupling coefficient formula of the microring resonator,the advantages and disadvantages of various solutions to improve the coupling strength are respectively explained.Finally,a curved coupling zone structure is selected to enhance the coupling strength,and a solution to achieve critical coupling conditions under a wide coupling gap is obtained.A high-quality aluminum nitride single crystal film is grown on a sapphire substrate.Conductive glue is used to overcome the non-conductivity of the material.The electron beam exposure system is used to make the bending angle of 40°,the coupling gap of 0.190μm,and the waveguide width of 0.41μm.The microring resonant cavity is patterned,a number of aluminum nitride etching parameters are analyzed and optimized,and the pattern is finally transferred to the aluminum nitride layer to obtain a curved coupled aluminum nitride microring resonant cavity with uniform coupling gap and flat sidewalls.This research provides a reference for the selection of critical coupling conditions for aluminum nitride microring resonators.

关 键 词：氮化铝 微环谐振腔 临界耦合 弯曲耦合 电子束曝光 

分 类 号：TN256[电子电信—物理电子学] TN252