高精度石英半球裸振子微应力制造  

Micro-Stress Manufacturing of High Precision Quartz Hemispherical Bare-Resonator

作　　者：訾进锋 宋丽君 李绍良 苏定宁 熊安宁 赵万良 高立民[4] 陈效真[5] ZI Jinfeng;SONG Lijun;LI Shaoliang;SU Dingning;XIONG Anning;ZHAO Wanliang;GAO Limin;CHEN Xiaozhen(Xi'an Micromach Technology Co.,Ltd.,Xi’an 710119;Xi’an University of Architecture and Technology,Xi’an 710055;Shanghai Aerospace Control Technology Institute,Shanghai 201109;Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi’an 710119;China Academy of Aerospace Electronic Technology,Beijing 100048)

机构地区：[1]西安中科微精光子制造科技有限公司,西安710119 [2]西安建筑科技大学,西安710055 [3]上海航天控制技术研究所,上海201109 [4]中国科学院西安光学精密机械研究所,西安710119 [5]中国航天电子技术研究院,北京100048

出　　处：《飞控与探测》2021年第1期81-91,共11页Flight Control & Detection

基　　金：装备重大基础研究项目;陕西省自然科学基础研究计划项目(2020JM-488)。

摘　　要：半球谐振子是半球谐振陀螺的核心元件,其质量直接决定了陀螺的性能及精度。由高纯石英材料制成的半球谐振子已得到了业界的广泛认可,但其加工难度较高。半球裸振子是半球谐振子的未完全加工态,其加工表面残余应力的大小决定了谐振Q值、频差Δf等参数,进而影响着谐振性能。就石英半球裸振子的微应力制造技术方法和技术特点进行了分析和讨论,探讨了采用飞秒激光加工设备实现石英半球裸振子微应力制造的可行性。飞秒激光加工具有速度快、热变形小、非接触、微应力等优势。将其用于半球谐振子加工,能够明显改善加工效率,降低成本,改善表面应力状态。采用飞秒激光加工为高精度石英半球裸振子的加工提供了全新的实现途径。The hemispherical resonator is the core component of the hemispherical resonant gyroscope,and its quality directly determines the performance and accuracy of the gyroscope.The hemispherical resonator made of high purity quartz material has been widely recognized in the industry,but it is difficult to process.The hemispherical bare oscillator is the incomplete machined state of the hemispherical harmonic oscillator.The residual stress on the machined surface determines the resonant Q value,frequency differenceΔf and other parameters,and then affects the resonant performance.In this paper,the technical methods and characteristics of micro-stress manufacturing of quartz hemispherical bare oscillator are analyzed and discussed,and femtosecond laser processing equipment is used to realize micro-stress manufacturing of quartz hemispherical bare oscillator.Femtosecond laser processing has the advantages of high speed,small thermal deformation,non-contact,micro-stress and so on.The processing efficiency,cost and surface stress state of hemispherical harmonic oscillator can be obviously improved.Femtosecond laser processing provides a new way for the processing of high-precision quartz hemispherical bare vibrators.

关 键 词：半球谐振陀螺 石英半球裸振子 激光加工 微应力制造 飞秒激光 

分 类 号：U666.12[交通运输工程—船舶及航道工程]