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作 者:张志强 向道辉[1] 胡永伟 陈艳彬 赵波[1] 高国富[1] ZHANG Zhiqiang;XIANG Daohui;HU Yongwei;CHEN Yanbin;ZHAO Bo;GAO Guofu(School of Mechanical Engineering,Henan University of Technology,Jiaozuo 454000,China)
出 处:《中国表面工程》2021年第1期50-59,共10页China Surface Engineering
基 金:国家自然科学基金(51975188);河南省自然科学基金(182300410200)资助项目。
摘 要:利用激光技术在硬质合金刀具上分别制备椭圆织构和沟槽织构。同时,利用热丝化学气相沉积法(HFCVD)在刀具上分别制备硼掺杂无织构金刚石(Boron doped un-texture diamond film,BDUTD film)薄膜、硼掺杂椭圆织构金刚石(Boron doped elliptical textured diamond film,BDETD film)薄膜以及硼掺杂沟槽织构金刚石(Boron doped groove textured diamond film,BDGTD film)薄膜,通过摩擦磨损试验机,对不同织构形状的薄膜进行摩擦试验研究。另外,采用扫描电镜(SEM)、拉曼光谱(Raman)和能谱分析(EDX)对表面形貌、成分及残余物质进行分析。试验结果表明,BDUTD薄膜表现出最大平均摩擦因数,其值为0.13。BDETD以及BDGTD薄膜的平均摩擦因数分别为0.124和0.123。从磨损形貌来看,BDUTD薄膜及BDGTD薄膜对偶件的磨损直径分别为1.506 mm和1.254 mm。BDUTD薄膜的磨损表面黏附有少量团簇状的磨屑,且有破裂的金刚石晶粒出现。BDGTD薄膜的表面织构沟槽中有少量磨屑,金刚石晶粒几乎没有出现磨损。cemented carbide tools were provided with elliptical and groove textures using laser technology.boron-doped untextured diamond(BDUTD),boron-doped elliptical textured diamond(BDETD),and boron-doped grooved textured diamond(BDGTD)films were prepared by hot filament chemical vapor deposition(HFCVD).The friction test of films with different texture shapes was carried out on ball-on-disc friction tester.In addition,SEM,Raman and EDX were used to analyze the surface morphology,composition,structure and residual materials.The results show that BDUTD film shows the maximum average friction coefficient,which is 0.13.The average friction coefficient of BDETD Film and BDGTD film are 0.124 and 0.123,respectively.From the wear morphology,the wear diameter of BDUTD film and BDGTD film is 1.506 mm and 1.254 mm respectively.The wear surface of BDUTD film is adhered with a small amount of cluster debris,and there are broken diamond grains.There is a small amount of wear debris in the texture groove of BDGTD film,and the diamond grains hardly wear.
关 键 词:HFCVD 金刚石薄膜 表面织构 水润滑 摩擦磨损性能
分 类 号:TG71[金属学及工艺—刀具与模具]
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