基于MOS传感器阵列对有害混合气体的检测研究  

Research on detection of harmful mixture gas based on MOS sensor array

作　　者：王萧行 张卫强[1] 金庆辉 黄朝柱 唐浩 WANG Xiaohang;ZHANG Weiqiang;JIN Qinghui;HUANG Chaozhu;TANG Hao(Faculty of Electrical Engineering and Computer Science,Ningbo University,Ningbo 315211,China;New Energy Institute,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China)

机构地区：[1]宁波大学信息科学与工程学院,浙江宁波315211 [2]中国科学院宁波材料技术与工程研究所新能源所,浙江宁波315201

出　　处：《传感器与微系统》2021年第6期24-26,29,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61871243)。

摘　　要：金属氧化物(MOS)对挥发性有机化合物(VOCs)气体普遍存在着交叉敏感性问题,因此单个传感器无法准确做到对混合气体的定量分析。为解决这一问题,设计了基于多种金属氧化物半导体的传感器阵列,并搭建硬件系统平台,运用三种算法对实验采集到的35组苯和甲醛的混合气体数据进行对比分析与展现。实验结果表明:所提金属氧化物阵列结合随机森林算法进行后端数据处理对混合气体分类预测效果最好,整体预测准确率达到95%以上。The cross sensitivity of metal oxides semiconductor(MOS)to volatile organic compound(VOCs)is a common problem, so the mixed gases can not be analyzed accurately by single sensor.In order to solve this problem, a sensor array is designed based on a variety of semiconductor metal oxides and a hardware system platform is built, as well as using three algorithms to analyze and show the 35 groups of mixed gas data of benzene and formaldehyde.The experimental results show that the metal oxide array combined with random forest algorithm has the best classification prediction effect with an overall prediction accuracy of more than 95 %.

关 键 词：金属氧化物半导体 传感器阵列 混合有害气体 随机森林 定量分析 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]