自动称重系统在全自动硅片上下料机的应用  

Application of Auto Weighing System on Automatic Corrosion Feeding and Unloading Device

作　　者：剌颖乾 LA Yingqian(The 2nd Research Institute of CETC,Taiyuan 030024,China)

机构地区：[1]中国电子科技集团公司第二研究所,山西太原030024

出　　处：《电子工业专用设备》2021年第3期21-24,59,共5页Equipment for Electronic Products Manufacturing

摘　　要：以自主研发的刻蚀工序自动化设备为基础,设计上下料机自动称重系统,测量刻蚀工艺前后电池片的减薄量变化,为工艺优化提供有力数据支持,同时提高效率,避免人工称重对电池片的污染和产能的影响。Based on the etching process automation equipment developed by ourselves,design the automatic weighing system,the thickness reduction of the battery before and after the etching process is measured,which provides strong data support for process optimization.It has the advantages of high degree of automation,high measurement accuracy,avoiding silicon pollution,reducing capacity loss and so on.

关 键 词：光伏 刻蚀 称重系统 减薄量 

分 类 号：TN305[电子电信—物理电子学]