超光滑表面清洗技术的研究现状  

Research Status of the Super-smooth Surface Cleaning Technique

作　　者：张娟飞[1] 王新海[1] ZHANG Juanfei;WANG Xinhai(Shaanxi Institute of Technology Xi’an,Shaanxi 710300)

机构地区：[1]陕西国防工业职业技术学院,陕西西安710300

出　　处：《陕西国防职教研究》2021年第2期39-41,共3页Shaanxi Guofang Vocational Education Research

基　　金：陕西国防工业职业技术学院2020年度科研计划项目:激光陀螺腔体深小孔高精度抛光技术的研究(项目编号:Gfy20-05)。

摘　　要：随着超光滑表面元件在半导体加工行业、航空航天和国防军工领域的广泛应用,超光滑表面的清洗技术的质量与效果显得格外重要。本文介绍了超光滑表面表面的定义,阐述了四种超光滑表面清洗方法,并对其清洗特点、应用和今后发展进行了说明。通过超光滑表清洗技术现状的研究,为实际生产当中超光滑表面元件选择合适清洗方法提供了一定的参考,具有重要意义。With the wide-use of the parts with super-smooth surface in the industries of semi-conductor processing,aerospace and the national defense,the quality and effect of the cleaning technique of parts with super-smooth surface have become rather important.The definition of the super-smooth surface,and four cleaning techniques of this kind of surface are illustrated,and also the cleaning features,the appliance and future development are explained in the paper.Through the study,some important references for the suitable cleaning methods for the super-smooth surfaces are put forward in the paper.

关 键 词：超光滑表面 清洗技术 研究现状 

分 类 号：TG356.28[金属学及工艺—金属压力加工]