感应耦合等离子体中和枪的电子引出特性研究  

The characteristics of electron extraction of inductively coupled plasma neutralization gun

作　　者：罗先文 LUO Xian-wen(Guilin University of Technology,Guilin 541006)

机构地区：[1]桂林理工大学,桂林641006

出　　处：《核聚变与等离子体物理》2021年第2期187-192,共6页Nuclear Fusion and Plasma Physics

基　　金：国家自然科学基金(11405166);广西科技基地与人才专项(桂科AD20238068)。

摘　　要：给出了一种感应耦合等离子体源的设计,用于等离子体中和枪装置。通过实验方法研究等离子体源的电子引出特性,并结合理论分析了等离子体密度随射频功率的变化关系。研究结果表明等离子体源的电子引出特性与放电腔内气压有关联性,E?H模式转换中电子密度的变化与负载的电感值相关。研究成果对等离子体中和枪的发展有重要的参考价值。A design of inductively coupled plasma source using in plasma neutralization gun is present. The electron extraction characteristics of the plasma source were studied experimentally, and the relationship between plasma density and RF power was analyzed. The results show that the electron extraction characteristics of the plasma source are related to the gas pressure in the discharge chamber, and the change of electron density during E-H mode conversion is related to the inductance of the load.

关 键 词：等离子体中和枪 感应耦合等离子体 电子引出特性 

分 类 号：O562[理学—原子与分子物理]