声子晶体对ZnO/41°YX-LiNbO_(3)结构Love波器件性能的影响  

Influences of PnCs on Properties of Love Wave Device with ZnO/41°YX-LiNbO_(3) Structure

作　　者：商树林 梁苏鹏 肖勇兵 袁宇鑫 王艳[1] SHANG Shulin;LIANG Supeng;XIAO Yongbing;YUAN Yuxin;WANG Yan(College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210046,China)

机构地区：[1]南京邮电大学电子与光学工程学院微电子学院,江苏南京210046

出　　处：《压电与声光》2021年第3期324-327,共4页Piezoelectrics & Acoustooptics

基　　金：南京邮电大学基金资助项目(NY213018)。

摘　　要：利用三维有限元法(3D-FEM)分析了Ni柱型声子晶体对(110)ZnO/41°YX-LiNbO_(3)结构Love波器件声学特性(包括相速度、机电耦合系数和质量灵敏度等)的影响。结果表明,Ni柱的引入对所激发Love波性能的影响较大,Love波1阶模式阈值提前(激发1阶模式Love波所需的导波层厚度减小到0.05),机电耦合系数提高了约8%。同时,Ni柱/(110)ZnO/41°YX-LiNbO_(3)结构Love波器件的质量灵敏度也得到改善,其Love波0阶和1阶模式的质量灵敏度较无Ni柱结构Love波器件分别提高了3倍和4倍。该研究结果为利用声子晶体结构实现高频声表面波器件的研制及其应用领域的拓宽提供了理论依据。The influences of Ni pillar phononic crystal(Ni PnCs)on the acoustic properties(phase velocity,electro-mechanical coupling coefficient and mass sensitivity etc.)of Love wave devices with(110)ZnO/IDTs/41°YX-LiNbO_(3) structure are analyzed by the three-dimensional finite element method(3D-FEM).The influences of Ni pillars on SAW properties,including the phase velocity,electro-mechanical coupling coefficient,and mass sensitivity,are studied.The results indicate that the 1st mode properties of Love wave are greatly influenced by the introduction of Ni pillars,which are reflected by the significant decrease of cutoff point 0.05,and the increase of electro-mechanical coupling coefficient(~8%).Meanwhile,the mass sensitivities of the first two order Love wave modes are also improved,which are 3 and 4 times higher than that of Ni pillars-free Love waves,respectively.The results provide a theoretical basis for the fabrication of SAW devices operated with high frequency by using phononic crystals(PnCs),as well as the broadening of its application fields.

关 键 词：声表面波 声子晶体 有限元分析 机电耦合系数 LOVE波 

分 类 号：TN65[电子电信—电路与系统] O426[理学—声学]