基于ZnO多层结构的声表面波高频器件分析设计  

Analysis and Design of Surface Acoustic Wave High Frequency Devices Based on ZnO Multilayer Structure

作　　者：郭欣榕 谭秋林 李博[1,2] GUO Xinrong;TAN Qiulin;LI Bo(School of Instrμment and Electronics,North University of China,Taiyuan 030000,China;Key Laboratory of Electronic Testing Technology for National Defense Science and Technology,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,山西太原030000 [2]电子测试技术国防科技重点实验室,山西太原030051

出　　处：《电视技术》2021年第5期120-124,共5页Video Engineering

摘　　要：通过有限元仿真,分析基于ZnO/Diamond不同复合结构的声表面波传播特性,包括机电耦合系数、声表面波波速以及温度敏感系数等,同时分析电极厚度对机电耦合系数的影响机理,为适用于不同场合的高频器件的优化设计提供思路,对基于ZnO/Diamond不同复合结构的声表面波器件的设计具有指导意义。This paper analyzes the propagation characteristics of surface acoustic waves based on different composite structures of ZnO/Diamond through finite element simulation,including electromechanical coupling coefficient,surface acoustic wave velocity,temperature sensitivity coefficient,etc.At the same time,this paper analyze the influence mechanism of electrode thickness on the electromechanical coupling coefficient,which provides ideas for the optimal design of high-frequency devices suitable for different occasions,and the design of surface acoustic wave devices based on different composite structures of ZnO/Diamond has guiding significance.

关 键 词：声表面波 有限元仿真 ZNO压电薄膜 金刚石 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]