Tedlar复合材料表面飞秒激光刻蚀铝薄膜技术研究  

Femtosecond Laser Etching of Aluminum Film on Tedlar Composite Surfaces

作　　者：尚凯文[1] 吴敢[1] 刘孝丽 杨建平[1] 王瑞[1] Shang Kaiwen;Wu Gan;Liu Xiaoli;Yang Jianping;Wang Rui(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou,Gansu 730000,China;College of Energy Engineering,Yulin University,Yulin,Shaanxi 719000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,甘肃兰州730000 [2]榆林学院能源工程学院,陕西榆林719000

出　　处：《中国激光》2021年第10期166-175,共10页Chinese Journal of Lasers

基　　金：国家自然科学基金(51905471)。

摘　　要：研究不同的工艺参数对Tedlar复合材料-铝薄膜(厚度为2μm)表面形貌的影响,理论优化得到合理的工艺参数。研究结果表明,单位时间内极多数量飞秒激光脉冲的积累作用,使得铝膜表面的作用区域温度在极短时间内快速升高并超过铝的熔点和气化温度,表面铝膜最终被刻蚀去除;当激光功率增大到5.5 W时,界面处温度达到了513.19 K,超过了基底Tedlar材料的最高使用温度,并在基底材料表面烧蚀产生点坑;当扫描速度从350 mm/s增大至600 mm/s时,出现的间断点尺寸从1.2μm增大到2.7μm,造成激光刻蚀加工尺寸误差高于10μm;在激光输出功率为4.0 W、光斑直径为40μm和扫描速率为500 mm/s的工艺条件下,铝膜图形激光刻蚀后尺寸精度及相对位置精度均优于10μm,满足技术要求。Objective The materials system of Tedlar composite-aluminum film,which has the advantages of high specific strength and modulus,light weight,good stability,and high reflectivity,can be used for frequency choice(Frequency Selecting Surfaces,FSS)preparation.FSS are widely used in the field of spatial filters,radar antenna masks,antenna array radar scattering cross sections,reflectors for transmitted and reflected electromagnetic waves in different spectra,and so on.With the development of satellite antennas to high-frequency bands,the graphics size of the FSS unit is required to be smaller and smaller,and the dimensional accuracy is required to be higher.At present,the market has an urgent processing precision demand of less than 10μm,the traditional microprocessing technology being unable to meet the technical requirements.The technology of a femtosecond pulse laser has the characteristics of short pulse width and high peak power.It has little thermal effect on the etching process of composite-aluminum film,and the overall effect of etching the boundary of graphic unit is better than with a nanosecond laser.Therefore,there are important theoretical significance and application value to carrying out relevant studies on femtosecond laser etching of aluminum film on a Tedlar composite substrate.Methods In this paper,the effects of laser power,laser spot diameter,and scanning rate on the properties of Tedlar composite substrate-2μm aluminum film using femtosecond laser etching technology are studied by the method of combining theoretical simulations and experiments.The optimal technological parameters are obtained by theoretical optimization using ANSYS 14.0 software.The femtosecond laser etching composite technology under different process parameters is verified using Pharos-type equipment,and the surface morphology and sample size of the etched-processed samples are tested using noncontact three-dimensional surface graphic analysis equipment.Results and Discussions The simulation results show that the femtosecond

关 键 词：激光光学 Tedlar复合材料 飞秒激光刻蚀 工艺参数 铝膜 仿真分析 

分 类 号：TG178[金属学及工艺—金属表面处理]