原子力显微镜中PID参数最优控制策略研究  

Research on Optimal Control Strategy of PID Parameters in Atomic Force Microscope

作　　者：彭继慎[1] 海东琦 胡善华 胡朋举 孔繁会 PENG Ji-shen;HAI Dong-qi;HU Shan-hua;HU Peng-ju;KONG Fan-hui(College of Electrical and Control Engineering,Liaoning Technical University,Huludao 125105,China)

机构地区：[1]辽宁工程技术大学电气与控制工程学院,辽宁葫芦岛125105

出　　处：《控制工程》2021年第6期1130-1135,共6页Control Engineering of China

摘　　要：原子力显微镜(AFM)中PID参数对系统的性能起到决定性作用,选取较好的PID参数会提高系统整体稳定性和准确性。针对AFM系统中PID参数调节不准确问题,提出一种基于天牛群优化算法的PID最优控制策略。采用继电反馈对AFM系统进行分析,获取PID参数稳定运行区域,在约束范围下通过天牛群优化算法得到最优控制器参数及最佳性能指标,可以减少AFM系统中参数调节的不准确性和大量的调参工作,并且可根据实际需求改变性能指标获取相应的最佳参数值。仿真结果表明该控制策略可显著提高AFM系统扫描的稳定性、精度,并且有效避免探针超调振荡引起的样品破损。The PID parameters in atomic force microscope(AFM) play a decisive role in the performance of the system. The selection of better PID parameters can improve the overall stability and accuracy of the system. In order to solve the problem of inaccurate adjustment of PID parameters in AFM system, an optimal control strategy of PID based on longicorn beetle swarm optimization algorithm is proposed. The relay feedback is used to analyze AFM system, and the stable operation region of PID parameters is obtained. Under the constraint range, the optimal controller parameters and performance indexes are obtained by longicorn beetle swarm optimization algorithm. It can reduce the inaccuracy of parameter adjustment and a large number of parameter adjustment work in AFM system, and the corresponding optimal parameter values can be obtained by changing the performance indices according to the actual demand. The simulation results show that the control strategy can significantly improve the scanning stability and accuracy of AFM system, and effectively avoid the sample damage caused by probe overshoot oscillation.

关 键 词：原子力显微镜 继电反馈 天牛群优化算法 PID控制 

分 类 号：TP13[自动化与计算机技术—控制理论与控制工程]